METHODS OF FORMING SIC MOSFETS WITH HIGH INVERSION LAYER MOBILITY
First Claim
Patent Images
1. A method of forming an oxide layer on silicon carbide, comprising:
- thermally growing an oxide layer on a layer of silicon carbide; and
annealing the oxide layer in an environment containing NO at a temperature greater than 1175°
C.
2 Assignments
0 Petitions
Accused Products
Abstract
Methods of forming an oxide layer on silicon carbide include thermally growing an oxide layer on a layer of silicon carbide, and annealing the oxide layer in an environment containing NO at a temperature greater than 1175° C. The oxide layer may be annealed in NO in a silicon carbide tube that may be coated with silicon carbide. To form the oxide layer, a preliminary oxide layer may be thermally grown on a silicon carbide layer in dry O2, and the preliminary oxide layer may be re-oxidized in wet O2.
61 Citations
12 Claims
-
1. A method of forming an oxide layer on silicon carbide, comprising:
-
thermally growing an oxide layer on a layer of silicon carbide; and annealing the oxide layer in an environment containing NO at a temperature greater than 1175°
C. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
Specification