METHODS FOR NON LOT-BASED INTEGRATED CIRCUIT MANUFACTURING

• US 20100222913A1
• Filed: 05/10/2010
• Published: 09/02/2010
• Est. Priority Date: 03/24/1997
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Jones, Mark L., Barnett, Gregory A.
• Granted Patent: US 8,315,730 B2
• Time in Patent Office: Days
• US Class Current: 700/115
• CPC Class Codes: G01R 31/31718 Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis mechanical aspects G01R31/2808, G01R31/2851
• CPC Class Codes: G05B 19/128 the workpiece itself serves as a record carrier, e.g. by its form, by marks or codes on it
• CPC Class Codes: G05B 2219/31296 Identification, pallet object data and program code for station
• CPC Class Codes: G05B 2219/45026 Circuit board, pcb
• CPC Class Codes: G06F 11/006 Identification G06F11/2289 takes precedence
• CPC Class Codes: H01L 2223/5444 for electrical read out
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method for continuous, non lot-based manufacturing of integrated circuit (IC) devices of the type to each have a unique fuse identification (ID) includes: reading the fuse ID of each of the IC devices; advancing multiple lots of the IC devices through, for example, a test step in the manufacturing process in a substantially continuous manner; generating data, such as test data, related to the advancement of each of the IC devices through the step in the process; and associating the data generated for each of the IC devices with the fuse ID of its associated IC device.

Claims

1. A method of tracking a device in a manufacturing process, the method comprising:

associating a device with a substantially unique identification (ID) code;

advancing the device through at least a portion of the manufacturing process without regard to a lot from which the device comes;

generating data related to the advancement of the device through the at least a portion of the manufacturing process; and

associating the data with the substantially unique identification code.

2. The method of claim 1, wherein the substantially unique identification code comprises a fuse ID.

3. The method of claim 1, wherein associating a device with a substantially unique ID code comprises programming the device with the substantially unique ID code.

4. The method of claim 1, wherein the at least a portion of the manufacturing process comprises a step in the manufacturing process.

5. The method of claim 1, wherein the device comprises an integrated circuit (IC) device.

6. The method of claim 5, wherein the substantially unique ID code specifies a lot number, wafer number and wafer position for the IC device.

7. The method of claim 5, wherein the substantially unique ID code is the same for all IC devices derived from the same wafer.

8. The method of claim 5, wherein the substantially unique ID code is the same for all IC devices coming from the same lot.

9. The method of claim 1, further comprising reading the ID code before advancing the device through the at least a portion of the manufacturing process.

10. The method of claim 1, further comprising reading the ID code after advancing the device through the at least a portion of the manufacturing process.

11. The method of claim 1, further comprising storing the ID code before advancing the device through the at least a portion of the manufacturing process.

12. The method of claim 1, further comprising storing the ID code after advancing the device through the at least a portion of the manufacturing process.

13. The method of claim 1, wherein the data comprises process-related data.

14. The method of claim 1, wherein the data comprises a process variable.

15. The method of claim 14, wherein the data comprises a performance variable.

16. The method of claim 15, further comprising determining whether a correlation exists between the process variable and the performance variable.

17. The method of claim 1, further comprising outputting the device to mixed output lots.

18. The method of claim 1, wherein the data comprises a performance variable.

19. A method of tracking a device in a manufacturing process, the method comprising:

associating a device with a substantially unique identification (ID) code;

mixing the device with other devices without regard to lots;

advancing the device with the other devices through at least a portion of the manufacturing process without regard to a lot from which the device comes;

generating data related to the advancement of the device through the at least a portion of the manufacturing process; and

associating the data with the substantially unique identification code.

20. A method of tracking a device in a manufacturing process, the method comprising:

receiving the device from a plurality of mixed lots of devices without regard to a lot of the plurality of mixed lots from which the device comes;

associating a device with a substantially unique identification (ID) code;

advancing the device through at least a portion of the manufacturing process without regard to the lot from which the device comes;

generating data related to the advancement of the device through the at least a portion of the manufacturing process; and

associating the data with the substantially unique identification code.