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MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY

  • US 20100222998A1
  • Filed: 03/02/2010
  • Published: 09/02/2010
  • Est. Priority Date: 03/02/2009
  • Status: Active Grant
First Claim
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1. A micro-mechanical resonator, comprising two masses (M1, M2) coupled in the direction of their common motion axis of motion by a spring structure (401, 402, 403, 404a, 404b, 404c) such, that the spring structure comprises a spring (404a, 404b, 404c) coupling at least a certain first bar connected to the masses and a certain second bar extending in the motion axis direction, the spring being arranged to bend in a direction perpendicular to the motion direction of the motion axis.

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