INERTIAL SENSOR
First Claim
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1. An inertial sensor comprising:
- a drive structure operative to perform one reference oscillation in an XY plane; and
force detecting structures which each have a plurality of detection axes and which are arranged on an X axis and a Y axis in said drive structure in pairs at positions symmetrical about an origin,wherein angular velocities in three axes and accelerations in three axes are detected by providing said force detecting structure with the plurality of detection axes including at least a detection axis orthogonal to said one reference oscillation.
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Abstract
An inertial sensor includes a drive structure 11 which performs one reference oscillation in an XY plane, and force detecting structures 12 (12-1 to 12-4) which each have a plurality of detection axes and which are arranged on an X axis and a Y axis in the drive structure 11 in pairs at positions symmetrical about an origin, wherein angular velocities in three axes and accelerations in three axes are detected by providing the force detecting structure 12 with the plurality of detection axes including at least one detection axis orthogonal to the one reference oscillation.
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Citations
7 Claims
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1. An inertial sensor comprising:
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a drive structure operative to perform one reference oscillation in an XY plane; and force detecting structures which each have a plurality of detection axes and which are arranged on an X axis and a Y axis in said drive structure in pairs at positions symmetrical about an origin, wherein angular velocities in three axes and accelerations in three axes are detected by providing said force detecting structure with the plurality of detection axes including at least a detection axis orthogonal to said one reference oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification