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INERTIAL SENSOR

  • US 20100223996A1
  • Filed: 06/06/2007
  • Published: 09/09/2010
  • Est. Priority Date: 06/16/2006
  • Status: Active Grant
First Claim
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1. An inertial sensor comprising:

  • a drive structure operative to perform one reference oscillation in an XY plane; and

    force detecting structures which each have a plurality of detection axes and which are arranged on an X axis and a Y axis in said drive structure in pairs at positions symmetrical about an origin,wherein angular velocities in three axes and accelerations in three axes are detected by providing said force detecting structure with the plurality of detection axes including at least a detection axis orthogonal to said one reference oscillation.

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