Internal Stress Actuated Micro- and Nanomachines for Testing Physical Properties Of Micro and Nano-Sized Material Samples.
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Abstract
This invention provides an internal stress actuated micro- or nano-machine for measuring mechanical and/or electrical properties, e.g. traction measurement, compression measurement or shear measurement, on micro-scale and nano-scale films or multi-layers of materials such as metallic materials, carbon-based materials and silicon-base materials. The device of the invention has applications in materials production industry, as well as in micro-electronics and for surface treatments and functionalization.
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Citations
63 Claims
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1-45. -45. (canceled)
- 46. A micro- or nano-tensometer for measuring one or more mechanical and/or electromechanical and/or opticomechanical, and/or chemico-mechanical and/or thermomechanical properties on a micro- or nano-size material sample, said micro- or nano-tensometer comprising a substrate, and an actuator for connecting to said micro- or nano-size material sample, wherein internal stress present in said actuator provides, after chemical and/or physical release, a deformation of said micro- or nano-size material sample from which said mechanical and/or electromechanical and/or opticomechanical, and/or chemico-mechanical and/or thermomechanical properties of the micro- or nano-size material sample can be determined.
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61. A method for measuring one or more mechanical and/or electromechanical and/or optiomechanical, and/or chemico-mechanical and/or thermomechanical properties on a micro- or nano-size material sample, comprising the steps of:
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providing one or more elementary micro- or nano-tensometer, each comprising an actuator involving internal stresses, a material sample to be tested and a substrate, wherein in each of said one or more micro- or nano-tensometers, the material sample to be tested is connected to both the actuator and the substrate, releasing chemically and/or physically said material sample to be tested and said actuator in each of said one or more micro- or nano-tensometers, measuring the displacement of the material sample to be tested and/or an electric current through the material to be tested and/or an optical signal from or through the sample to be tested and/or a physico-chemical state of the material to be tested in each of said one or more micro- or nano-tensometer, and determining from said displacement and/or electric current and/or optical signal and/or physico-chemical state the one or more mechanical and/or electromechanical and/or opticomechanical, and/or chemico-mechanical and/or thermomechanical properties of the micro- or nano-size material sample, wherein said releasing comprises releasing internal stress in the actuator for providing a deformation of the micro- or nano-size material sample. - View Dependent Claims (62)
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63. A method for manufacturing a micro- or nano-tensometer for measuring one or more mechanical and/or electromechanical and/or opticomechanical, and/or chemico-mechanical and/or thermomechanical properties on a micro- or nano-size material sample, said micro- or nano-tensometer comprising a substrate, and an actuator for connecting to said micro- or nano-size material sample, wherein internal stress present in said actuator provides, after chemical and/or physical release, a deformation of said micro- or nano-size material sample from which said mechanical and/or electromechanical and/or opticomechanical, and/or chemico-mechanical and/or thermomechanical properties of the micro- or nano-size material sample can be determined, the method comprising the steps of:
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a) providing a substrate at a first temperature, b) connecting an actuator to said substrate at a second temperature, c) connecting a micro or nano-material sample to be tested to said substrate and to said actuator at a third temperature, wherein said first, second and third temperatures are different or the same.
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Specification