ENDPOINT DETECTION FOR A REACTOR CHAMBER USING A REMOTE PLASMA CHAMBER

• US 20100224322A1
• Filed: 02/03/2010
• Published: 09/09/2010
• Est. Priority Date: 03/03/2009
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Davis, Matthew F., SUI, ZHIFENG
• Application Number:
  US12/699,677
• Publication Number:
  US 20100224322A1
• Time in Patent Office: Days
• US Class Current: 156/345.250
• CPC Class Codes: G01N 21/68 using high frequency electric fields
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01J 37/32972 Spectral analysis

Abstract

An analysis chamber coupled to a processing chamber includes an actively switchable capacitive-inductive coupling apparatus providing excitation in a capacitively coupled mode and an inductively coupled mode.

Claims

1. An analysis chamber coupled to a processing chamber, said analysis chamber configured to determine an endpoint of a process and comprising an optical window through which the interior of said analysis chamber is viewable by a detection apparatus, and further comprising an actively switchable capacitive-inductive coupling apparatus providing excitation in a capacitively coupled mode and an inductively coupled mode.

2. The analysis chamber of claim 1 further comprising a controller governing said actively switchable capacitive-inductive coupling apparatus, said controller being configured to vary a duty cycle of said capacitive coupling mode between 0 and 100% in accordance with a desired degree of dissociation in said analysis chamber.

3. The analysis chamber of claim 1 further comprising an RF coil antenna configured to be coupled to an RF power source.

4. The analysis chamber of claim 3 further comprising a pair of opposing electrodes at opposing sides of said analysis chamber and configured to be coupled to an RF power source.

5. The analysis chamber of claim 3 wherein said actively switchable capacitive-inductive coupling apparatus comprises a controllable switch connected between adjacent portions of said RF coil antenna.

6. The analysis chamber of claim 5 wherein said controllable switch comprises a PIN diode.

7. The analysis chamber of claim 6 further comprising a programmable controller governing said switch, wherein said programmable controller is programmed to provide capacitive coupling of RF power into said chamber during plasma ignition by turning said switch off, and then turning said switch on after plasma ignition.

8. The analysis chamber of claim 6 wherein said programmable controller is programmed to cycle coupling of RF power from said coil antenna between an inductively coupled mode and a capacitively coupled mode by cycling said switch between on and off states in accordance with a duty cycle.

9. The analysis chamber of claim 8 wherein said controller is programmed to control dissociation in said analysis chamber by controlling said duty cycle.

10. The analysis chamber of claim 1 further comprising an integrated laser or UV source for dissociating gaseous species in said analysis chamber.

11. The analysis chamber of claim 1 wherein said analysis chamber comprises a main chamber portion and a sub-chamber, said optical window located in said sub-chamber, and sub-chamber RF excitation apparatus for coupling RF power into said sub-chamber, said sub-chamber RF excitation apparatus being controllable for continuous cleaning of said optical window.

12. The analysis chamber of claim 11 further comprising a sub-chamber cleaning gas supply coupled to said sub-chamber, and containing a gas suitable for cleaning of the optical window.

13. The analysis chamber of claim 11 further comprising a plasma confinement magnet adjacent a boundary between said main chamber portion and said sub-chamber.

14. The analysis chamber of claim 13 wherein said plasma confinement magnet is a permanent magnet.

15. The analysis chamber of claim 11 further comprising an annular barrier within said analysis chamber at a boundary between said main chamber portion and said sub-chamber.

16. The analysis chamber of claim 1 wherein said analysis chamber comprises a main chamber portion and a sub-chamber, said optical window located in said sub-chamber, and a plasma confinement magnet adjacent a boundary between said main chamber portion and said sub-chamber.

17. The analysis chamber of claim 16 wherein said plasma confinement magnet is a permanent magnet.

18. The analysis chamber of claim 16 further comprising an annular barrier within said analysis chamber at a boundary between said main chamber portion and said sub-chamber.

19. An analysis chamber coupled to a processing chamber and comprising:

an optical window through which the interior of said analysis chamber is viewable by a detection apparatus;

power applicator apparatus comprising at least one of;

(a) an RF coil antenna external of and concentric with said analysis chamber and capable of being coupled to an RF power source, or

(b) a pair of opposing electrodes at opposing external sides of and concentric with said analysis chamber and configured to be coupled to an RF power source; and

wherein said analysis chamber comprises a main chamber portion and a sub-chamber, said optical window located in said sub-chamber, and annular separation apparatus concentric with a boundary between said main chamber portion and said sub-chamber, said annular separation apparatus comprising at least one of;

(a) an annular-shaped permanent magnet outside of said analysis chamber, or

(b) an annular barrier inside said analysis chamber defining a center opening facing said optical window.

20. The analysis chamber of claim 19 further comprising:

sub-chamber RF excitation apparatus for coupling RF power into said sub-chamber, said sub-chamber RF excitation apparatus being controllable for continuous cleaning of said optical window.

21. The analysis chamber of claim 20 further comprising a sub-chamber cleaning gas supply coupled to said sub-chamber, and containing a gas suitable for cleaning of the optical window.

22. The analysis chamber of claim 19 wherein said analysis chamber is coupled to a vacuum exhaust port of said processing chamber.