ENDPOINT DETECTION FOR A REACTOR CHAMBER USING A REMOTE PLASMA CHAMBER
First Claim
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1. An analysis chamber coupled to a processing chamber, said analysis chamber configured to determine an endpoint of a process and comprising an optical window through which the interior of said analysis chamber is viewable by a detection apparatus, and further comprising an actively switchable capacitive-inductive coupling apparatus providing excitation in a capacitively coupled mode and an inductively coupled mode.
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Abstract
An analysis chamber coupled to a processing chamber includes an actively switchable capacitive-inductive coupling apparatus providing excitation in a capacitively coupled mode and an inductively coupled mode.
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Citations
22 Claims
- 1. An analysis chamber coupled to a processing chamber, said analysis chamber configured to determine an endpoint of a process and comprising an optical window through which the interior of said analysis chamber is viewable by a detection apparatus, and further comprising an actively switchable capacitive-inductive coupling apparatus providing excitation in a capacitively coupled mode and an inductively coupled mode.
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19. An analysis chamber coupled to a processing chamber and comprising:
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an optical window through which the interior of said analysis chamber is viewable by a detection apparatus; power applicator apparatus comprising at least one of; (a) an RF coil antenna external of and concentric with said analysis chamber and capable of being coupled to an RF power source, or (b) a pair of opposing electrodes at opposing external sides of and concentric with said analysis chamber and configured to be coupled to an RF power source; and wherein said analysis chamber comprises a main chamber portion and a sub-chamber, said optical window located in said sub-chamber, and annular separation apparatus concentric with a boundary between said main chamber portion and said sub-chamber, said annular separation apparatus comprising at least one of; (a) an annular-shaped permanent magnet outside of said analysis chamber, or (b) an annular barrier inside said analysis chamber defining a center opening facing said optical window. - View Dependent Claims (20, 21, 22)
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Specification