PLASMA GENERATING APPARATUS, PLASMA GENERATING METHOD AND REMOTE PLASMA PROCESSING APPARATUS
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Abstract
A compact plasma generating apparatus providing high efficiency of plasma excitation is presented. A plasma generating apparatus (100) comprises a microwave generating apparatus (10) for generating microwaves, a coaxial waveguide (20) having a coaxial structure comprising an inner tube (20a) and an outer tube (20b), a monopole antenna (21) being attached to one end of said inner tube (20a), for directing the microwaves generated by said microwave generating apparatus (10) to the monopole antenna (21), a resonator (22) composed of dielectric material for holding the monopole antenna (21), and a chamber (23) in which a specific process gas is fed for plasma excitation. The chamber (23) has an open surface and the resonator (22) is placed on this open surface, and the process gas is excited by the microwaves radiated from the monopole antenna (21) through the resonator (22) into the interior of the chamber (23) to generate plasma.
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Citations
28 Claims
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1-17. -17. (canceled)
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18. A plasma generating apparatus comprising:
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a microwave generating apparatus for generating microwaves with a predetermined wavelength; a coaxial waveguide having a coaxial structure comprising an inner tube and an outer tube, an antenna being attached to one end of said inner tube, for directing the microwaves generated by said microwave generating apparatus to said antenna; a resonator composed of dielectric material for holding said antenna; and a chamber in which a specific process gas is fed for plasma excitation, said chamber having an open surface, said resonator being placed on said open surface, wherein said process gas is excited by the microwaves radiated from said antenna through said resonator into the interior of said chamber, and wherein said antenna is a slot antenna. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification