ALUMINUM OXIDE SINTERED BODY, METHOD FOR PRODUCING THE SAME AND MEMBER FOR SEMICONDUCTOR PRODUCING APPARATUS
First Claim
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1. An aluminum oxide sintered body containing:
- europium and nitrogen; and
plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile dispersed over a whole sintered body.
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Abstract
An aluminum oxide sintered body of the invention includes: europium and nitrogen; and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile dispersed over a whole sintered body. Such an aluminum oxide sintered body can be obtained by: forming a mixed powder containing an alumina powder, a europium compound powder and an aluminum nitride powder into a green body having a predetermined shape; and sintering the green body under a non-oxidizing atmosphere.
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11 Claims
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1. An aluminum oxide sintered body containing:
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europium and nitrogen; and plate-like crystals having peaks coinciding with EuAl12O19 in an X-ray diffraction profile dispersed over a whole sintered body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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