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OSCILLATING ANGULAR SPEED SENSOR

  • US 20100229646A1
  • Filed: 03/12/2010
  • Published: 09/16/2010
  • Est. Priority Date: 03/13/2009
  • Status: Active Grant
First Claim
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1. An oscillating angular speed sensor comprising:

  • a detector arranged on a face of a substrate, the detector havinga fixed electrode supported by a part of the substrate, anda movable electrode to oppose to the fixed electrode so as to be movable relative to the fixed electrode in a movable direction,a driving portion arranged on the face of the substrate, the driving portion driving the detector to oscillate in a drive direction approximately perpendicular to the movable direction; and

    a separating portion fixed on the face of the substrate so as to be distanced from the detector and the driving portion, whereinthe movable electrode is displaced by Coriolis force applied to the detector, when an angular speed is generated while the detector is oscillated, such that the angular speed is detected based on a capacitance variation generated in accordance with a variation of an interval between the movable electrode and the fixed electrode, andthe separating portion is configured to separate a first space accommodating the detector and a second space accommodating the driving portion.

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