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COINTEGRATED MEMS SENSOR AND METHOD

  • US 20100229651A1
  • Filed: 03/16/2009
  • Published: 09/16/2010
  • Est. Priority Date: 03/16/2009
  • Status: Active Grant
First Claim
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1. A MEMS sensor comprising:

  • a first layer,a base layer,a first insulating layer disposed between the first layer and the base layer, anda cavity that has been formed in any of the foregoing layers, such that the first layer is the substrate of the semiconductor electrical circuit and as the active MEMS element.

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