Exposure apparatus, exposure method, and device manufacturing method
First Claim
Patent Images
1. An exposure apparatus that exposes a substrate, comprising:
- an optical system that has an optical element on which a first and second exposure lights are incident and from which a first and second branched lights each having the first and second exposure lights are exited, each of first and second exposure fields being irradiated with the first and second exposure lights corresponding to the first branched light, each of third and fourth exposure fields being irradiated with the first and second exposure light corresponding to the second branched light, whereina predetermined field on a first substrate is multiply exposed with the first and second exposure lights corresponding to the first branched light and a predetermined field on a second substrate is multiply exposed with the first and second exposure lights corresponding to the second branched light.
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Abstract
An exposure apparatus includes: an optical system having an optical element on which a first exposure light and a second exposure light are incident, the first exposure light and the second exposure light from the optical element being irradiated onto a first exposure field and a second exposure field; and a detection device that detects at least one of the first exposure light and the second exposure light, which are from the optical element and are directed towards a different direction from directions towards the first and second exposure fields.
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Citations
26 Claims
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1. An exposure apparatus that exposes a substrate, comprising:
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an optical system that has an optical element on which a first and second exposure lights are incident and from which a first and second branched lights each having the first and second exposure lights are exited, each of first and second exposure fields being irradiated with the first and second exposure lights corresponding to the first branched light, each of third and fourth exposure fields being irradiated with the first and second exposure light corresponding to the second branched light, wherein a predetermined field on a first substrate is multiply exposed with the first and second exposure lights corresponding to the first branched light and a predetermined field on a second substrate is multiply exposed with the first and second exposure lights corresponding to the second branched light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An exposure apparatus that exposes a substrate, comprising:
an optical system that includes a first system and a second system, the first system forming images of first and second patterns in a first field, the second system forming images of the first and second patterns in a second field different from the first field, a part of the second system being united in the first system, a first substrate being multiply exposed with the images formed in the first field of the first and second patterns, a second substrate being multiply exposed with the images formed in the second field of the first and second patterns. - View Dependent Claims (15, 16, 17)
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18. An exposure method for exposing a substrate, the method comprising:
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irradiating each of first and second exposure fields with first and second exposure lights corresponding to a first branched light and each of third and fourth exposure fields with the first and second exposure lights corresponding to a second branched light by means of an optical system that has an optical element on which the first and second exposure lights are incident and from which the first and second branched lights each having the first and second exposure lights are exited; and multiply exposing a predetermined field on a first substrate with the first branched light and a predetermined field on a second substrate with the second branched light. - View Dependent Claims (19, 20, 21, 26)
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22. An exposure method for exposing a substrate, the method comprising:
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forming images of first and second patterns on a first field and images of the first and second patterns on a second field different from the first field; and multiply exposing a first substrate with the images formed in the first field of the first and second patterns and a second substrate with the images formed in the second field of the first and second patterns. - View Dependent Claims (23, 24, 25)
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Specification