PATTERN VERIFYING METHOD, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN VERIFYING PROGRAM
First Claim
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1. A pattern verifying method comprising:
- setting, based on three-dimensional structures of layers of a semiconductor integrated circuit, a specification concerning a layout of a layout pattern arranged on a layer; and
verifying whether a pattern transferred on a wafer based on design layout data of the layout pattern subjected to proximity correction satisfies the specification.
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Abstract
A specification of a layout of a layout pattern arranged on a layer is set based on three-dimensional structures of layers of a semiconductor integrated circuit. It is verified whether a layout pattern formed on a wafer based on design layout data subjected to proximity correction satisfies the specification.
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Citations
20 Claims
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1. A pattern verifying method comprising:
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setting, based on three-dimensional structures of layers of a semiconductor integrated circuit, a specification concerning a layout of a layout pattern arranged on a layer; and verifying whether a pattern transferred on a wafer based on design layout data of the layout pattern subjected to proximity correction satisfies the specification. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing a semiconductor device comprising:
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setting, based on three-dimensional structures of layers of a semiconductor integrated circuit, a specification concerning a layout of a layout pattern arranged on a layer; verifying whether a pattern transferred on a wafer based on design layout data subjected to proximity correction satisfies the specification; and transferring a pattern onto a semiconductor substrate based on the design layout verified as satisfying the specification. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A pattern verifying computer program product for causing a computer to execute:
verifying whether a pattern transferred on a wafer based on a design layout data subjected to proximity correction satisfies a specification concerning a layout of a layout pattern set based on three-dimensional structures of layers of a semiconductor integrated circuit. - View Dependent Claims (20)
Specification