Tri-axis Angular Rate Sensor
First Claim
1. An angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes, comprising a substrate, a sense frame disposed in a plane formed by the first and second input axes, means for mounting the sense frame on the substrate and permitting the sense frame to rotate about the first, second, and third input axes independently of one another, a plurality of proof masses having predetermined drive axes in the plane with at least two drive axes forming an angle with one another which is larger than 0 and less than 180 degrees, means for mounting the masses on the sense frame and constraining each mass for linear movement relative to the sense frame along the drive axis of the mass in drive-mode and for rotation with the sense frame in sense modes, means for coupling the proof masses together to form a single drive-mode oscillation, actuation means for driving the masses to oscillate in drive-mode, detection means for monitoring sense mode rotation of the proof masses and the sense frame about the first, second, and third input axes in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively.
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Accused Products
Abstract
Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.
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Citations
32 Claims
- 1. An angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes, comprising a substrate, a sense frame disposed in a plane formed by the first and second input axes, means for mounting the sense frame on the substrate and permitting the sense frame to rotate about the first, second, and third input axes independently of one another, a plurality of proof masses having predetermined drive axes in the plane with at least two drive axes forming an angle with one another which is larger than 0 and less than 180 degrees, means for mounting the masses on the sense frame and constraining each mass for linear movement relative to the sense frame along the drive axis of the mass in drive-mode and for rotation with the sense frame in sense modes, means for coupling the proof masses together to form a single drive-mode oscillation, actuation means for driving the masses to oscillate in drive-mode, detection means for monitoring sense mode rotation of the proof masses and the sense frame about the first, second, and third input axes in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively.
- 14. An angular rate sensor for detecting rotation, comprising a substrate, a plurality of generally planar proof masses disposed around a center for linear oscillations along multi-directional drive axes which lie in the plane of the masses and intersect one another approximately at the center with at least two drive axes forming an angle with one another which is larger than 0 and less than 180 degrees, coupling structures connected between adjacent ones of the masses for constraining the masses to oscillate in a cooperative manner in drive-mode, comb drives mounted on at least one of the masses for driving the masses to oscillate in drive-mode, a first, second and third mutually perpendicular input axes with the first and second input axes lying in the plane of the masses and the third input axis perpendicular to the plane, a sense frame disposed in the plane of the masses and mounted on the substrate by a suspension structure for rotation about the first, second and third input axes independent of one another, flexures mounting the masses on the sense frame for linear movements relative to the sense frame along the drive axes in drive-mode and for rotation with the sense frame about each input axis in sense modes, and capacitance sensors responsive to sense mode rotation movements of the masses and the sense frame about the first, second, and third input axes in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively, for monitoring rate of rotation.
- 20. An angular rate sensor for detecting rotation, comprising at least one input axis, each being pre-selected from three mutually perpendicular axes, a plurality of proof masses being coupled together for linear drive-mode oscillation along drive axes in a plane formed by the first and second axes of said three mutually perpendicular axes, with at least two masses oscillating along drive axes forming an angle with one another which is larger than zero and less than 180 degrees, means for driving the masses to oscillate in drive-mode, a sense frame disposed in the plane for supporting the masses and mounted for rotation with the masses about each said input axis independent of one another in sense mode in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the rotational movement of the sense frame and the masses about each input axis for monitoring the rate of rotation.
Specification