×

Tri-axis Angular Rate Sensor

  • US 20100236327A1
  • Filed: 03/17/2009
  • Published: 09/23/2010
  • Est. Priority Date: 03/17/2009
  • Status: Active Grant
First Claim
Patent Images

1. An angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes, comprising a substrate, a sense frame disposed in a plane formed by the first and second input axes, means for mounting the sense frame on the substrate and permitting the sense frame to rotate about the first, second, and third input axes independently of one another, a plurality of proof masses having predetermined drive axes in the plane with at least two drive axes forming an angle with one another which is larger than 0 and less than 180 degrees, means for mounting the masses on the sense frame and constraining each mass for linear movement relative to the sense frame along the drive axis of the mass in drive-mode and for rotation with the sense frame in sense modes, means for coupling the proof masses together to form a single drive-mode oscillation, actuation means for driving the masses to oscillate in drive-mode, detection means for monitoring sense mode rotation of the proof masses and the sense frame about the first, second, and third input axes in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×