Methods of Operating Microvalve Assemblies and Related Structures and Related Devices
First Claim
1. A valve assembly comprising:
- a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port wherein the second chamber is physically oriented between the first and third chambers;
a first electro-statically actuated valve between the first and second chambers wherein the first electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal; and
a second electro-statically actuated valve between the second and third chambers wherein the second electro-statically actuated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal.
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Abstract
A valve assembly may include a main housing and first and second electro-statically actuated valves. The main housing may define at least three chambers, with a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port. The first electro-statically actuated valve may be provided between the first and second chambers, and the first electro-statically actuated valve may allow or substantially block fluid communication between the first chamber and the second chamber responsive to a first electrical signal. The second electro-statically actuated valve may be provided between the second and third chambers, and the second electro-statically actuated valve may allow or substantially block fluid communication between the second chamber and the third chamber responsive to a second electrical signal. Related methods are also discussed.
99 Citations
60 Claims
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1. A valve assembly comprising:
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a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port wherein the second chamber is physically oriented between the first and third chambers; a first electro-statically actuated valve between the first and second chambers wherein the first electro-statically actuated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal; and a second electro-statically actuated valve between the second and third chambers wherein the second electro-statically actuated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 28, 29, 30, 31, 32)
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26-27. -27. (canceled)
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33-55. -55. (canceled)
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56. A valve assembly comprising:
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a main housing defining at least three chambers, a first chamber configured to be coupled to a high pressure supply port, a second chamber configured to be coupled to an output port, and a third chamber configured to be coupled to a low pressure exhaust port wherein the second chamber is physically oriented between the first and third chambers; a first photo-lithographically fabricated valve between the first and second chambers wherein the first photo-lithographically fabricated valve allows or substantially blocks fluid communication between the first chamber and the second chamber responsive to a first electrical signal; and a second photo-lithographically fabricated valve between the second and third chambers wherein the second photo-lithographically fabricated valve allows or substantially blocks fluid communication between the second chamber and the third chamber responsive to a second electrical signal. - View Dependent Claims (57, 58, 59)
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60-65. -65. (canceled)
Specification