Manufacturing Apparatus and Manufacturing Method of Lighting Device

• US 20100236691A1
• Filed: 03/10/2010
• Published: 09/23/2010
• Est. Priority Date: 03/18/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Granted Patent: US 9,214,632 B2
• Time in Patent Office: Days
• US Class Current: 156/67
• CPC Class Codes: B29C 65/7844 cooperating with specially formed features of at least one of the parts to be joined, e.g. cooperating with holes or ribs of at least one of the parts to be joined parts to be joined comprising holes or slots for the purpose of positioning said parts B29C65/7808; parts to be joined comprising inter-cooperating positioning features B29C65/7814; welding using friction, the welding tool cooperating with specially formed features of at least one of the parts to be joined, e.g. cooperating with holes or ribs of at least one of the parts to be joined B29C65/069
• CPC Class Codes: B29C 65/7879 said parts to be joined moving in a closed path, e.g. a rectangular path B29C65/7888 takes precedence
• CPC Class Codes: B29C 66/00145 Vacuum, e.g. partial vacuum
• CPC Class Codes: B29C 66/452 the article having a disc form, e.g. making CDs or DVDs
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/228 Gas flow assisted PVD deposition
• CPC Class Codes: C23C 14/246 Replenishment of source material
• CPC Class Codes: C23C 14/566 using a load-lock chamber
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: H10K 50/125 specially adapted for multicolour light emission, e.g. for emitting white light
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition
• CPC Class Codes: H10K 71/40 Thermal treatment, e.g. annealing in the presence of a solvent vapour
• CPC Class Codes: H10K 71/60 Forming conductive regions or layers, e.g. electrodes

Abstract

A manufacturing apparatus of a lighting device, including a vacuum chamber, an exhaust system by which the vacuum chamber is set to a reduced-pressure state, and a transfer chamber from which a substrate is transferred to the vacuum chamber is provided. The vacuum chamber of the manufacturing apparatus includes a plurality of deposition chambers in which a first electrode, a first light-emitting unit including at least a light-emitting layer, an intermediate layer, a second light-emitting unit including at least a light-emitting layer, a second electrode, a sealing film are formed, and a substrate transfer means by which the substrate is sequentially transferred to the deposition chambers.

Claims

1. A manufacturing apparatus of a lighting device, comprising:

a vacuum chamber;

an exhaust system by which the vacuum chamber is set to a reduced-pressure state; and

a transfer chamber in which a substrate is transferred to the vacuum chamber,

wherein the vacuum chamber comprises;

a deposition chamber in which a first electrode is formed over the substrate;

a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode;

a deposition chamber in which an intermediate layer is formed over the first light-emitting unit;

a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer;

a deposition chamber in which a second electrode is formed over the second light-emitting unit;

a deposition chamber in which a sealing film is formed over the substrate provided with the second electrode; and

a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber.

2. The manufacturing apparatus of a lighting device, according to claim 1, wherein the vacuum chamber further comprises a deposition chamber in which a drying agent layer is formed.

3. A manufacturing apparatus of a lighting device, comprising:

a vacuum chamber;

an exhaust system by which the vacuum chamber is set to a reduced-pressure state; and

a transfer chamber from which a substrate is transferred to the vacuum chamber,

wherein the vacuum chamber comprises;

a deposition chamber in which a first electrode is formed over the substrate;

a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode;

a deposition chamber in which an intermediate layer is aimed over the first light-emitting unit;

a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer;

a deposition chamber in which a second electrode is formed over the second light-emitting unit;

a sealing chamber in which the substrate provided with the second electrode is sealed with a sealing member; and

a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber and the sealing chamber.

4. The manufacturing apparatus of a lighting device, according to claim 3, wherein the vacuum chamber further comprises a deposition chamber in which a drying agent layer is formed.

5. A manufacturing apparatus of a lighting device, comprising:

a vacuum chamber;

an exhaust system by which the vacuum chamber is set to a reduced-pressure state;

a transfer chamber from which a substrate is transferred to the vacuum chamber; and

a sealing chamber which is connected to the vacuum chamber through a gate valve,

wherein the vacuum chamber comprises;

a deposition chamber in which a first electrode is formed over the substrate;

a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode;

a deposition chamber in which an intermediate layer is formed over the first light-emitting unit;

a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer;

a deposition chamber in which a second electrode is formed over the second light-emitting unit; and

a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber, and

wherein in the sealing chamber, the substrate which is transferred from the vacuum chamber is sealed with a sealing member.

6. The manufacturing apparatus of a lighting device, according to claim 5, wherein the vacuum chamber further comprises a deposition chamber in which a drying agent layer is formed.

7. A method for manufacturing a lighting device, comprising the steps of

transferring a substrate to a vacuum chamber;

and

successively forming a light-emitting element including a first electrode, a first light-emitting unit, an intermediate layer, a second light-emitting unit, a second electrode and a sealing film which seals the light-emitting element over the substrate, in a plurality of deposition chambers which is placed in the vacuum chamber.

8. The method for manufacturing a lighting device, according to claim 7, wherein a circular substrate is used for the substrate.

9. The method for manufacturing a lighting device, according to claim 7, wherein the substrate has an opening portion in a central portion.

10. A method for manufacturing a lighting device, comprising the steps of:

transferring a substrate to a vacuum chamber;

forming a light-emitting element including a first electrode, a first light-emitting unit, an intermediate layer, a second light-emitting unit, and a second electrode over the substrate in a plurality of deposition chambers which is placed in the vacuum chamber;

transferring the substrate provided with the light-emitting element to a sealing chamber which is placed in the vacuum chamber; and

sealing the substrate with a sealing member in the sealing chamber.

11. The method for manufacturing a lighting device, according to claim 10, wherein a circular substrate is used for the substrate.

12. The method for manufacturing a lighting device, according to claim 10, wherein the substrate has an opening portion in a central portion.

13. A method for manufacturing a lighting device, comprising the steps of:

transferring a substrate to a vacuum chamber;

forming a light-emitting element including a first electrode, a first light-emitting unit, an intermediate layer, a second light-emitting unit, and a second electrode over the substrate in a plurality of deposition chambers which is placed in the vacuum chamber;

transferring the substrate provided with the light-emitting element to a sealing chamber which is connected to the vacuum chamber through a gate valve; and

sealing the substrate with a sealing member in the sealing chamber.

14. The method for manufacturing a lighting device, according to claim 13, wherein a circular substrate is used for the substrate.

15. The method for manufacturing a lighting device, according to claim 13, wherein the substrate has an opening portion in a central portion.