Manufacturing Apparatus and Manufacturing Method of Lighting Device
First Claim
1. A manufacturing apparatus of a lighting device, comprising:
- a vacuum chamber;
an exhaust system by which the vacuum chamber is set to a reduced-pressure state; and
a transfer chamber in which a substrate is transferred to the vacuum chamber,wherein the vacuum chamber comprises;
a deposition chamber in which a first electrode is formed over the substrate;
a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode;
a deposition chamber in which an intermediate layer is formed over the first light-emitting unit;
a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer;
a deposition chamber in which a second electrode is formed over the second light-emitting unit;
a deposition chamber in which a sealing film is formed over the substrate provided with the second electrode; and
a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber.
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Accused Products
Abstract
A manufacturing apparatus of a lighting device, including a vacuum chamber, an exhaust system by which the vacuum chamber is set to a reduced-pressure state, and a transfer chamber from which a substrate is transferred to the vacuum chamber is provided. The vacuum chamber of the manufacturing apparatus includes a plurality of deposition chambers in which a first electrode, a first light-emitting unit including at least a light-emitting layer, an intermediate layer, a second light-emitting unit including at least a light-emitting layer, a second electrode, a sealing film are formed, and a substrate transfer means by which the substrate is sequentially transferred to the deposition chambers.
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Citations
15 Claims
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1. A manufacturing apparatus of a lighting device, comprising:
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a vacuum chamber; an exhaust system by which the vacuum chamber is set to a reduced-pressure state; and a transfer chamber in which a substrate is transferred to the vacuum chamber, wherein the vacuum chamber comprises; a deposition chamber in which a first electrode is formed over the substrate; a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode; a deposition chamber in which an intermediate layer is formed over the first light-emitting unit; a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer; a deposition chamber in which a second electrode is formed over the second light-emitting unit; a deposition chamber in which a sealing film is formed over the substrate provided with the second electrode; and a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber. - View Dependent Claims (2)
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3. A manufacturing apparatus of a lighting device, comprising:
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a vacuum chamber; an exhaust system by which the vacuum chamber is set to a reduced-pressure state; and a transfer chamber from which a substrate is transferred to the vacuum chamber, wherein the vacuum chamber comprises; a deposition chamber in which a first electrode is formed over the substrate; a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode; a deposition chamber in which an intermediate layer is aimed over the first light-emitting unit; a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer; a deposition chamber in which a second electrode is formed over the second light-emitting unit; a sealing chamber in which the substrate provided with the second electrode is sealed with a sealing member; and a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber and the sealing chamber. - View Dependent Claims (4)
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5. A manufacturing apparatus of a lighting device, comprising:
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a vacuum chamber; an exhaust system by which the vacuum chamber is set to a reduced-pressure state; a transfer chamber from which a substrate is transferred to the vacuum chamber; and a sealing chamber which is connected to the vacuum chamber through a gate valve, wherein the vacuum chamber comprises; a deposition chamber in which a first electrode is formed over the substrate; a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode; a deposition chamber in which an intermediate layer is formed over the first light-emitting unit; a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer; a deposition chamber in which a second electrode is formed over the second light-emitting unit; and a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber, and wherein in the sealing chamber, the substrate which is transferred from the vacuum chamber is sealed with a sealing member. - View Dependent Claims (6)
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7. A method for manufacturing a lighting device, comprising the steps of
transferring a substrate to a vacuum chamber; - and
successively forming a light-emitting element including a first electrode, a first light-emitting unit, an intermediate layer, a second light-emitting unit, a second electrode and a sealing film which seals the light-emitting element over the substrate, in a plurality of deposition chambers which is placed in the vacuum chamber. - View Dependent Claims (8, 9)
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10. A method for manufacturing a lighting device, comprising the steps of:
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transferring a substrate to a vacuum chamber; forming a light-emitting element including a first electrode, a first light-emitting unit, an intermediate layer, a second light-emitting unit, and a second electrode over the substrate in a plurality of deposition chambers which is placed in the vacuum chamber; transferring the substrate provided with the light-emitting element to a sealing chamber which is placed in the vacuum chamber; and sealing the substrate with a sealing member in the sealing chamber. - View Dependent Claims (11, 12)
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13. A method for manufacturing a lighting device, comprising the steps of:
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transferring a substrate to a vacuum chamber; forming a light-emitting element including a first electrode, a first light-emitting unit, an intermediate layer, a second light-emitting unit, and a second electrode over the substrate in a plurality of deposition chambers which is placed in the vacuum chamber; transferring the substrate provided with the light-emitting element to a sealing chamber which is connected to the vacuum chamber through a gate valve; and sealing the substrate with a sealing member in the sealing chamber. - View Dependent Claims (14, 15)
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Specification