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Manufacturing Apparatus and Manufacturing Method of Lighting Device

  • US 20100236691A1
  • Filed: 03/10/2010
  • Published: 09/23/2010
  • Est. Priority Date: 03/18/2009
  • Status: Active Grant
First Claim
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1. A manufacturing apparatus of a lighting device, comprising:

  • a vacuum chamber;

    an exhaust system by which the vacuum chamber is set to a reduced-pressure state; and

    a transfer chamber in which a substrate is transferred to the vacuum chamber,wherein the vacuum chamber comprises;

    a deposition chamber in which a first electrode is formed over the substrate;

    a deposition chamber in which a first light-emitting unit including at least a light-emitting layer is formed over the first electrode;

    a deposition chamber in which an intermediate layer is formed over the first light-emitting unit;

    a deposition chamber in which a second light-emitting unit including at least a light-emitting layer is formed over the intermediate layer;

    a deposition chamber in which a second electrode is formed over the second light-emitting unit;

    a deposition chamber in which a sealing film is formed over the substrate provided with the second electrode; and

    a substrate transfer means by which the substrate is sequentially transferred to each deposition chamber.

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