THIN FILM TRANSISTOR, METHOD FOR MANUFACTURING THIN FILM TRANSISTOR, AND DISPLAY DEVICE
First Claim
1. A thin film transistor which has a semiconductor layer containing a microcrystalline silicon, comprising:
- a gate electrode;
a microcrystalline silicon layer containing a microcrystalline silicon, the microcrystalline silicon layer having an upper surface and a lower surface which are parallel to a substrate surface and an end surface which extends between the upper surface and the lower surface;
first and second contact layers containing impurities;
a source electrode which is in contact with the first contact layer; and
a drain electrode which is in contact with the second contact layer,wherein at least one of the first and second contact layers is in contact with the microcrystalline silicon layer only at the end surface without being in contact with any of the upper surface and the lower surface.
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Abstract
A thin film transistor with a large on-current and a reduced off-current is provided with high fabrication efficiency.
A thin film transistor of the present invention includes a gate electrode; and a microcrystalline silicon layer containing a microcrystalline silicon, the microcrystalline silicon layer having an upper surface and a lower surface which are parallel to a substrate surface and an end surface which extends between the upper surface and the lower surface; first and second contact layers containing impurities which are provided so as to be in contact with the microcrystalline silicon layer; a source electrode which is in contact with the first contact layer; and a drain electrode which is in contact with the second contact layer, wherein at least one of the first and second contact layers is in contact with the microcrystalline silicon layer only at the end surface without being in contact with any of the upper surface and the lower surface.
24 Citations
22 Claims
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1. A thin film transistor which has a semiconductor layer containing a microcrystalline silicon, comprising:
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a gate electrode; a microcrystalline silicon layer containing a microcrystalline silicon, the microcrystalline silicon layer having an upper surface and a lower surface which are parallel to a substrate surface and an end surface which extends between the upper surface and the lower surface; first and second contact layers containing impurities; a source electrode which is in contact with the first contact layer; and a drain electrode which is in contact with the second contact layer, wherein at least one of the first and second contact layers is in contact with the microcrystalline silicon layer only at the end surface without being in contact with any of the upper surface and the lower surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for fabricating a thin film transistor which has a semiconductor layer containing a microcrystalline silicon, the method comprising the steps of:
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forming a gate electrode; forming a microcrystalline silicon layer which contains a microcrystalline silicon; forming first and second contact layers which contain impurities; and forming a source electrode and a drain electrode so as to be in contact with the first and second contact layers, respectively, wherein the microcrystalline silicon layer has an upper surface and a lower surface which are parallel to a substrate surface and an end surface which extends between the upper surface and the lower surface, and at least one of the first and second contact layers and the microcrystalline silicon are formed so as to be in contact with each other only at the end surface of the microcrystalline silicon layer without having a contact at any of the upper surface and the lower surface. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22)
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Specification