Barrier for Through-Silicon Via
First Claim
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1. A semiconductor device comprising:
- a substrate having an opening;
a liner formed along sidewalls of the opening;
a barrier layer overlying the liner along the sidewalls of the opening, the barrier layer comprising carbon or fluorine;
a seed layer overlying the barrier layer along the sidewalls of the opening; and
a conductive material formed on the seed layer and filling the opening.
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Abstract
A system and a method for protecting through-silicon vias (TSVs) is disclosed. An embodiment comprises forming an opening in a substrate. A liner is formed in the opening and a barrier layer comprising carbon or fluorine is formed along the sidewalls and bottom of the opening. A seed layer is formed over the barrier layer, and the TSV opening is filled with a conductive filler. Another embodiment includes a barrier layer formed using atomic layer deposition.
101 Citations
20 Claims
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1. A semiconductor device comprising:
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a substrate having an opening; a liner formed along sidewalls of the opening; a barrier layer overlying the liner along the sidewalls of the opening, the barrier layer comprising carbon or fluorine; a seed layer overlying the barrier layer along the sidewalls of the opening; and a conductive material formed on the seed layer and filling the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing a semiconductor device comprising:
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providing a substrate with an opening located therein; forming a barrier layer along sidewalls and a bottom of the opening using an atomic layer deposition process; forming a seed layer overlying the barrier layer; and forming a conductive material on the seed layer, filling the opening. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification