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SYSTEM AND METHOD FOR BIASING CMUT ELEMENTS

  • US 20100237807A1
  • Filed: 03/18/2010
  • Published: 09/23/2010
  • Est. Priority Date: 03/18/2009
  • Status: Active Grant
First Claim
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1. A system for biasing a capacitive ultrasonic transducer (CMUT) device comprising:

  • a circuit includinga CMUT that includes a first plate and a second plate that form a membrane structure;

    a circuit voltage source at a complementary metal-oxide-semiconductor (CMOS) compatible voltage;

    a bias voltage source that applies a bias voltage greater than a CMOS compatible voltage and is applied to the first plate; and

    readout electronics with an input connected on the second plate side of the circuit.

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