Sea of Pillars
First Claim
Patent Images
1. A method for near simultaneously creating multiple devices on a single piezoelectric composite substrate, comprising:
- depositing first type patterns on a first side of the substrate, the first type patterns being aligned with a first direction;
depositing second type patterns on a second side of the substrate, the second type patterns being aligned with a second direction;
wherein each of the first type patterns functionally corresponds with one of the second type patterns to form a corresponding pair; and
singulating the corresponding pairs within the substrate.
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Abstract
Provided is a method for manufacturing multiple devices on a single piezoelectric composite substrate. The piezoelectric composite substrate is significantly larger than a size required for a single device, thus multiple sensors can be simultaneously fabricated from the same piezoelectric composite substrate.
55 Citations
7 Claims
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1. A method for near simultaneously creating multiple devices on a single piezoelectric composite substrate, comprising:
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depositing first type patterns on a first side of the substrate, the first type patterns being aligned with a first direction; depositing second type patterns on a second side of the substrate, the second type patterns being aligned with a second direction; wherein each of the first type patterns functionally corresponds with one of the second type patterns to form a corresponding pair; and singulating the corresponding pairs within the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification