PORTABLE OPTICAL DETECTION CHIP AND MANUFACTURING METHOD THEREOF
First Claim
1. The method for manufacturing a portable optical detection chip, comprising the steps of:
- forming a plurality of avalanche-type photosensitive devices on a substrate;
disposing a hydrophobic layer on the avalanche-type photosensitive devices and the substrate, wherein the hydrophobic layer covers areas excluding photosensitive areas of the avalanche-type photosensitive devices;
forming a lens on the photosensitive area of each of the avalanche-type photosensitive devices; and
forming a plurality of inclined plane mirrors on the substrate, wherein the plane mirrors partition the avalanche-type photosensitive devices into a plurality of groups.
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Abstract
A portable optical detection chip comprises a substrate, a plurality of avalanche-type photosensitive device modules and a plurality of plane mirrors. The plurality of avalanche-type photosensitive device modules are formed on the substrate, and each of them comprises a plurality of avalanche-type photosensitive devices and a plurality of lenses. Each of the lenses is stacked on one of the avalanche-type photosensitive devices. The plurality of plane mirrors are disposed between the avalanche-type photosensitive device modules. That is, the avalanche-type photosensitive device modules are separated from each other by the plane mirrors.
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Citations
12 Claims
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1. The method for manufacturing a portable optical detection chip, comprising the steps of:
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forming a plurality of avalanche-type photosensitive devices on a substrate; disposing a hydrophobic layer on the avalanche-type photosensitive devices and the substrate, wherein the hydrophobic layer covers areas excluding photosensitive areas of the avalanche-type photosensitive devices; forming a lens on the photosensitive area of each of the avalanche-type photosensitive devices; and forming a plurality of inclined plane mirrors on the substrate, wherein the plane mirrors partition the avalanche-type photosensitive devices into a plurality of groups. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification