VERTICALLY INTEGRATED MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING
First Claim
1. A microelectromechanical systems (MEMS) sensor device comprising:
- a first substrate having a first side;
a first sensor disposed on said first side and configured to sense a first physical stimulus;
a second substrate having a second side, said second substrate being coupled to said first substrate with said second side facing said first side; and
a second sensor disposed on said second side and situated facing said first sensor, said second sensor being configured to sense a second physical stimulus, said second physical stimulus differing from said first physical stimulus.
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Accused Products
Abstract
A microelectromechanical systems (MEMS) sensor device (184) includes a sensor portion (180) and a sensor portion (182) that are coupled together to form a vertically integrated configuration having a hermetically sealed chamber (270). The sensor portions (180, 182) can be formed utilizing different micromachining techniques, and are subsequently coupled utilizing a wafer bonding technique to form the sensor device (184). The sensor portion (180) includes one or more sensors (186, 188), and the sensor portion (182) includes one or more sensors (236, 238). The sensors (186, 188) are located inside the chamber (270) facing the sensors (236, 238) also located inside the chamber (270). The sensors (186, 188, 236, 238) are configured to sense different physical stimuli, such as motion, pressure, and magnetic field.
115 Citations
20 Claims
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1. A microelectromechanical systems (MEMS) sensor device comprising:
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a first substrate having a first side; a first sensor disposed on said first side and configured to sense a first physical stimulus; a second substrate having a second side, said second substrate being coupled to said first substrate with said second side facing said first side; and a second sensor disposed on said second side and situated facing said first sensor, said second sensor being configured to sense a second physical stimulus, said second physical stimulus differing from said first physical stimulus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of producing a microelectromechanical systems (MEMS) sensor device comprising:
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forming a first sensor on a first side of a first substrate, said first sensor being adapted to sense a first physical stimulus, said first sensor including a first movable element that is movable relative to said first side; forming a second sensor on a second side of a second substrate, said second sensor being adapted to sense a second physical stimulus, said second physical stimulus differing from said first physical stimulus, said second sensor including a second movable element that is movable relative to said second side; and after forming said first and second sensors, coupling said second substrate with said first substrate such that said second side faces said first side and said second movable element is situated facing said first movable element. - View Dependent Claims (14, 15, 16)
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17. A microelectromechanical systems (MEMS) sensor device comprising:
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a first substrate having a first side; a first sensor disposed on said first side and configured to sense a first physical stimulus, said first sensor including a movable element adapted to move in response to said first physical stimulus; a second substrate having a second side, said second substrate being coupled to said first substrate with said second side facing said first side to form a hermetically sealed chamber; a second sensor disposed on said second side and situated facing said first sensor, said second sensor being configured to sense a second physical stimulus, said second physical stimulus differing from said first physical stimulus, and said first and second sensors being located in said chamber; and an over-travel stop positioned between said movable element and said second sensor, said over-travel stop being in non-movable connection with one of said first and second sides, said over-travel stop being adapted to limit movement of said movable element in a direction perpendicular to said first and second sides of said first and second substrates. - View Dependent Claims (18, 19, 20)
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Specification