MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE
First Claim
1. A MEMS sensor comprising:
- a support portion;
a movable weight portion;
a connection portion connecting the support portion and the movable weight portion, is possible an elastic deformation;
a fixed electrode portion extending from the support portion; and
a movable electrode portion extending from the movable weight portion and disposed opposed to the fixed electrode portion, whereinthe movable weight portion includes a first movable weight portion and a second movable weight portion positioned below the first movable weight portion.
1 Assignment
0 Petitions
Accused Products
Abstract
A MEMS sensor manufactured by processing a multi-layer stacked structure formed on a substrate, includes: a fixed frame portion formed in the substrate; a movable weight portion coupled to the fixed frame portion via an elastic deformable portion and having a hollow portion formed at the periphery; a fixed electrode portion protrudingly formed from the fixed frame portion toward the hollow portion; and a movable electrode portion moving integrally with the movable weight portion and facing the fixed electrode portion, wherein the movable weight portion includes a first movable weight portion formed of the multi-layer stacked structure and a second movable weight portion positioned below the first movable weight portion and formed of the material of the substrate.
38 Citations
13 Claims
-
1. A MEMS sensor comprising:
-
a support portion; a movable weight portion; a connection portion connecting the support portion and the movable weight portion, is possible an elastic deformation; a fixed electrode portion extending from the support portion; and a movable electrode portion extending from the movable weight portion and disposed opposed to the fixed electrode portion, wherein the movable weight portion includes a first movable weight portion and a second movable weight portion positioned below the first movable weight portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A MEMS sensor manufacturing method for a MEMS sensor having a support portion;
- a movable weight portion;
a connection portion connecting the support portion and the movable weight portion, is possible an elastic deformation;
a fixed electrode portion extending from the support portion; and
a movable electrode portion extending from the movable weight portion and disposed opposed to the fixed electrode portion, comprising;first process forming a laminated layer structure on a first plane of a substrate; second process forming a hole penetrating from a top layer of the laminated layer structure to the substrate, by anisotropic etching; third process removing the substrate positioned below the fixed electrode portion and the movable electrode portion, by isotropically etching. - View Dependent Claims (13)
- a movable weight portion;
Specification