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MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE

  • US 20100242606A1
  • Filed: 03/25/2010
  • Published: 09/30/2010
  • Est. Priority Date: 03/26/2009
  • Status: Abandoned Application
First Claim
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1. A MEMS sensor comprising:

  • a support portion;

    a movable weight portion;

    a connection portion connecting the support portion and the movable weight portion, is possible an elastic deformation;

    a fixed electrode portion extending from the support portion; and

    a movable electrode portion extending from the movable weight portion and disposed opposed to the fixed electrode portion, whereinthe movable weight portion includes a first movable weight portion and a second movable weight portion positioned below the first movable weight portion.

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