AIR PRESSURE SENSOR WITH TEMPERATURE COMPENSATION
First Claim
1. An air pressure sensor comprising:
- a first conductive membrane configured for deflection in response to pressure differences between air at a reference pressure and air at a pressure to be sensed;
a second conductive membrane configured for deflection in response to a change in temperature which the pressure sensor is exposed thereto; and
a circuit in electrical communication with the first and second conductive membranes, wherein the circuit is configured to obtain a first signal and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the air pressure.
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Accused Products
Abstract
An air pressure sensor that has a first conductive membrane configured for deflection in response to pressure differences between air at a reference pressure and air at a pressure to be sensed. The sensor also has a second conductive membrane configured for deflection in response to a change in temperature to which the pressure sensor is exposed. The sensor uses a circuit in electrical communication with the first and second conductive membranes, that obtains a first signal and second signal from the first and second conductive membranes respectively. The first and second signals are indicative of the deflection of the first and second conductive membranes. The circuit adjusts the first signal by the second signal to generate an output signal indicative of the air pressure.
39 Citations
19 Claims
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1. An air pressure sensor comprising:
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a first conductive membrane configured for deflection in response to pressure differences between air at a reference pressure and air at a pressure to be sensed; a second conductive membrane configured for deflection in response to a change in temperature which the pressure sensor is exposed thereto; and a circuit in electrical communication with the first and second conductive membranes, wherein the circuit is configured to obtain a first signal and second signal from the first and second conductive membranes respectively, the first and second signals being indicative of the deflection of the first and second conductive membranes, wherein the circuit adjusts the first signal by the second signal to generate an output signal indicative of the air pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 13, 17, 18, 19)
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- 11. The air pressure sensor according to claim 11 wherein at least one of the membranes is corrugated.
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12. The air pressure sensor according to claim 12 wherein, the membrane corrugations have a period of between 5 microns and 15 microns.
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15. The air pressure sensor according to claim 15 wherein at least one of the flexible corrugated membranes has a corrugation factor of 8.
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16. The air pressure sensor according to claim 16 wherein the sensor has a linear response up to about 1 MPa.
Specification