ORGANIC ELECTRONIC DEVICE, ORGANIC ELECTRONIC DEVICE MANUFACTURING METHOD, ORGANIC ELECTRONIC DEVICE MANUFACTURING APPARATUS, SUBSTRATE PROCESSING SYSTEM, PROTECTION FILM STRUCTURE AND STORAGE MEDIUM WITH CONTROL PROGRAM STORED THEREIN
First Claim
1. An organic electronic device comprising:
- an organic element formed on a target object; and
a protection film that covers the organic element,wherein the protection film comprises;
a stress relaxing layer that is formed to be adjacent to the organic element and cover the organic element, and contains a carbon component and contains no nitrogen components; and
a sealing layer that is formed on the stress relaxing layer and contains a nitrogen component.
1 Assignment
0 Petitions
Accused Products
Abstract
An organic element is protected by a protection film which has high sealing performance while relaxing a stress and does not change the characteristics of the organic element. In a substrate processing system Sys, a substrate processing apparatus 10, which includes a deposition apparatus PM1, a first microwave plasma processing apparatus PM3, and a second microwave plasma processing apparatus PM4, is arranged in a cluster structure, and an organic electronic device is manufactured by keeping a space where a substrate G moves from carry-in to carry-out in a desired depressurized state. An organic EL element is formed by the deposition apparatus PM1, butyne gas is plasmatized by microwave power by the first microwave plasma processing apparatus PM3, and an aCHx film 54 is formed adjacent to the organic EL element to cover the organic EL element. Then, silane gas and nitrogen gas are plasmatized by microwave power by the second microwave plasma processing apparatus PM4, and a SiNx film 55 is formed on the aCHx film 54.
21 Citations
35 Claims
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1. An organic electronic device comprising:
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an organic element formed on a target object; and a protection film that covers the organic element, wherein the protection film comprises; a stress relaxing layer that is formed to be adjacent to the organic element and cover the organic element, and contains a carbon component and contains no nitrogen components; and a sealing layer that is formed on the stress relaxing layer and contains a nitrogen component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of manufacturing an organic electronic device, the method comprising:
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forming an organic element on a target object; and stacking a stress relaxing layer to be adjacent to the organic element and cover the organic element, to serve as one layer included in a protection film that protects the organic element, wherein the stress relaxing layer contains a carbon component and contains no nitrogen components; and stacking a sealing layer on the stress relaxing layer, to serve as another layer included in the protection film, wherein the sealing layer contains a nitrogen component. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 35)
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27. An apparatus for manufacturing an organic electronic device, wherein the apparatus:
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forms an organic element on a target object; stacks a stress relaxing layer to be adjacent to the organic element and cover the organic element, to serve as one layer included in a protection film that covers the organic element, wherein the stress relaxing layer contains a carbon component and contains no nitrogen components; and stacks a sealing layer on the stress relaxing layer, to serve as another layer included in the protection film, wherein the sealing layer contains a nitrogen component.
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28. A substrate processing system in which a substrate processing apparatus comprising a deposition apparatus, a first microwave plasma processing apparatus, and a second microwave plasma processing apparatus is arranged in a cluster structure, and an organic electronic device is manufactured while maintaining a space where a target object moves from an area where the target object is carried in to an area where the target object is carried out in a desired depressurized state,
wherein the substrate processing system: -
forms an organic element within a processing chamber of the deposition apparatus; generates plasma by exciting a gas including a butyne gas by microwave power and forms an amorphous hydrocarbon film to be adjacent to the organic element and cover the organic element by using the plasma, within a processing chamber of the first microwave plasma processing apparatus; and generates plasma by exciting a gas including a silane gas and a nitrogen gas by microwave power and forms a first silicon nitride film on the amorphous hydrocarbon film by using the plasma, within a processing chamber of the second microwave plasma processing apparatus. - View Dependent Claims (29, 30, 31, 32)
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33. A protection film structure for protecting an organic element formed on a target object, the protection film structure comprising:
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a stress relaxing layer stacked adjacent to the organic element to cover the organic element, to serve as one layer included in the protection film, wherein the stress relaxing layer contains a carbon component and contains no nitrogen components; and a sealing layer stacked on the stress relaxing layer, to serve as another layer included in the protection film, wherein the sealing layer contains a nitrogen component. - View Dependent Claims (34)
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Specification