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MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE

  • US 20100244160A1
  • Filed: 03/25/2010
  • Published: 09/30/2010
  • Est. Priority Date: 03/26/2009
  • Status: Active Grant
First Claim
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1. A MEMS sensor comprising:

  • a support portion;

    a movable weight portion;

    a connection portion connecting the support portion and the movable weight portion, is possible an elastic deformation;

    a fixed electrode portion extending from the support portion; and

    a movable electrode portion extending from the movable weight portion and disposed opposed to the fixed electrode portion, whereinat least one of the movable weight portion, the connection portion, the fixed electrode portion, and the movable electrode portion, includes an adjusting layer.

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