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SOLID-STATE IMAGING DEVICE, FABRICATION METHOD THEREOF, IMAGING APPARATUS, AND FABRICATION METHOD OF ANTI-REFLECTION STRUCTURE

  • US 20100244169A1
  • Filed: 03/22/2010
  • Published: 09/30/2010
  • Est. Priority Date: 03/31/2009
  • Status: Active Grant
First Claim
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1. A fabrication method of an anti-reflection structure, the method comprising the steps of:

  • forming a resin film having micro-particles dispersed therein on a surface of a substrate;

    forming a protrusion dummy pattern on the resin film by etching the resin film using the micro-particles in the resin film as a mask while gradually etching the micro-particles; and

    forming a protrusion pattern on the surface of the substrate by etching back the surface of the substrate together with the resin film having the protrusion dummy pattern formed thereon, and transferring a surface shape of the protrusion dummy pattern formed on a surface of the resin film to the surface of the substrate.

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