STRUCTURE AND METHOD FOR LATCHUP IMPROVEMENT USING THROUGH WAFER VIA LATCHUP GUARD RING
First Claim
Patent Images
1. A method of manufacturing a semiconductor structure, comprising:
- forming a latchup sensitive structure;
masking the latchup sensitive structure;
flipping the latchup sensitive structure and substrate to gain access to an underside thereof; and
etching a trough via through the substrate and adjacent the latchup sensitive structure using lithography and etching to isolate the latchup sensitive structure from at least an external source.
6 Assignments
0 Petitions
Accused Products
Abstract
A method and structure for preventing latchup. The structure includes a latchup sensitive structure and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure.
-
Citations
25 Claims
-
1. A method of manufacturing a semiconductor structure, comprising:
-
forming a latchup sensitive structure; masking the latchup sensitive structure; flipping the latchup sensitive structure and substrate to gain access to an underside thereof; and etching a trough via through the substrate and adjacent the latchup sensitive structure using lithography and etching to isolate the latchup sensitive structure from at least an external source. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method of forming a structure, comprising:
-
forming at least a P+ diffusion structure that is sensitive to latchup; and forming a guard ring structure bounding the P+ diffusion structure to isolate the P+ diffusion structure from external sources. - View Dependent Claims (9, 10)
-
-
11. A structure, comprising:
-
a latchup sensitive structure; and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
-
-
20. A structure comprising:
-
a latchup sensitive structure; and a guard ring that bounds the latchup sensitive structure to isolate the latchup sensitive structure from an external source. - View Dependent Claims (21, 22, 23, 24)
-
-
25. A design structure embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit, the design structure comprising a latchup sensitive structure, and a guard ring that bounds the latchup sensitive structure to isolate the latchup sensitive structure from an external source.
Specification