VIA STRUCTURE AND VIA ETCHING PROCESS OF FORMING THE SAME
First Claim
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1. A method, comprising:
- providing a semiconductor substrate;
forming a hard mask layer on the semiconductor substrate;
forming a photoresist layer on the hard mask layer;
patterning the photoresist layer to form a first opening;
patterning the hard mask layer to form a second opening underlying the first opening, exposing a portion of the semiconductor substrate;
etching the exposed portion of the semiconductor substrate to form a via passing through at least a part of the semiconductor substrate;
performing a trimming process to round the top corner of the via; and
removing the photoresist layer.
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Abstract
A via etching process forms a through-substrate via having a round corner and a tapered sidewall profile. A method includes providing a semiconductor substrate; forming a hard mask layer and a patterned photoresist layer on the semiconductor substrate; forming an opening in the hard mask and exposing a portion of the semiconductor substrate; forming a via passing through at least a part of the of semiconductor substrate using the patterned photoresist layer and hard mask layer as a masking element; performing a trimming process to round the top corner of the via; and removing the photoresist layer.
108 Citations
18 Claims
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1. A method, comprising:
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providing a semiconductor substrate; forming a hard mask layer on the semiconductor substrate; forming a photoresist layer on the hard mask layer; patterning the photoresist layer to form a first opening; patterning the hard mask layer to form a second opening underlying the first opening, exposing a portion of the semiconductor substrate; etching the exposed portion of the semiconductor substrate to form a via passing through at least a part of the semiconductor substrate; performing a trimming process to round the top corner of the via; and removing the photoresist layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method, comprising:
providing a semiconductor substrate comprising a hard mask layer formed thereon; forming an interconnect structure in the hard mask layer; forming a photoresist layer on the hard mask layer; patterning the photoresist layer to form a first opening; patterning the hard mask layer to form a second opening underlying the first opening, exposing a portion of the semiconductor substrate; etching the exposed portion of the semiconductor substrate to form a via passing through at least a part of the semiconductor substrate; performing a trimming process to round the top corner of the via; and removing the photoresist layer. - View Dependent Claims (9, 10, 11, 12)
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13. An integrated circuit structure, comprising:
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a semiconductor substrate; a hard mask layer formed on the semiconductor substrate; at least a conductive layer formed in the hard mask layer; and a via extending from the hard mask layer to at least a portion of the semiconductor substrate, wherein the via has a round corner and a tapered sidewall. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification