Two-Mirror Scanning System
First Claim
Patent Images
1. An apparatus comprising:
- a substrate;
a first scan mirror coupled to, and nominally parallel to, the substrate and operable to have a variable angular displacement in a first dimension;
a fold mirror positioned on, and parallel to, the substrate; and
a second scan mirror positioned to receive light reflected from the fold mirror and to reflect light to the first scan mirror, the second scan mirror operable to have an angular displacement in a second dimension substantially 90 degrees from the first dimension.
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Abstract
A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.
35 Citations
28 Claims
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1. An apparatus comprising:
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a substrate; a first scan mirror coupled to, and nominally parallel to, the substrate and operable to have a variable angular displacement in a first dimension; a fold mirror positioned on, and parallel to, the substrate; and a second scan mirror positioned to receive light reflected from the fold mirror and to reflect light to the first scan mirror, the second scan mirror operable to have an angular displacement in a second dimension substantially 90 degrees from the first dimension. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An apparatus comprising:
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a first fold mirror to reflect an input light beam; a second fold mirror to reflect light received from the first fold mirror; a fast scan mirror positioned to receive light from the second fold mirror and provide a light beam scanned in a first dimension; and a slow scan mirror positioned to receive the light beam from the fast scan mirror and to provide a light beam scanned in a second dimension, wherein the slow scan mirror and the second fold mirror are coupled to a common substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A micro-electromechanical systems (MEMS) device comprising:
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a substrate; a scanning platform coupled to the substrate, the scanning platform operable to have a variable angular displacement with respect to the substrate; and a fixed mirror on the substrate. - View Dependent Claims (19, 20, 21, 22)
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23. An apparatus comprising:
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a fold mirror to reflect an input light beam; a first scan mirror positioned to receive light from the fold mirror and provide a light beam scanned in a first dimension; a second scan mirror positioned to receive the light beam from the first scan mirror and to provide a light beam scanned in a second dimension; and an output optic positioned to intersect the light beam from the second scan mirror, wherein the fold mirror is positioned on the output optic. - View Dependent Claims (24, 25)
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26. A mobile projection device comprising:
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a laser light source to produce modulated laser light; a first fold mirror to reflect the modulated laser light; a second fold mirror to reflect light received from the first fold mirror; a first scan mirror positioned to receive light from the second fold mirror; and a second scan mirror positioned to receive the light beam from the first scan mirror, wherein the second scan mirror and the second fold mirror are coupled to a common substrate. - View Dependent Claims (27, 28)
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Specification