SYSTEM AND METHOD FOR A MEMS DEVICE
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Accused Products
Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
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Citations
67 Claims
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1-53. -53. (canceled)
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54. A device for modulating light comprising:
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a first layer comprising a first non-metallic reflective surface and a second layer comprising a second non-metallic reflective surface, the first layer and the second layer defining a cavity therebetween, the first layer being movable relative to the second layer along substantially an entire direction of motion of the first layer within the cavity; and a control circuit configured to apply a continuously variable voltage to cause a continuous movement of the first layer, wherein at least one of the first reflective surface and the second reflective surface comprises a broad band minor configured to operate across a visible range. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62, 63)
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64. A device for modulating light comprising:
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a first layer and a second layer that define a cavity therebetween, the first layer being movable relative to the second layer; a control circuit configured to apply a continuously variable voltage to cause a continuous movement of at least one of the first and second layer; and a third layer coupled to the first layer, the third layer being configured to limit deformation of the first layer during said continuous movement of the first layer. - View Dependent Claims (65)
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66. A method for driving a device for modulating light, the method comprising:
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continuously varying a voltage between a first layer and a second layer of the device; causing a continuous variation in a dimension of a cavity formed by the first and second layer, the variation in the dimension in response to the continuously varying voltage; and limiting deformation of the first layer with a third layer during said continuous movement of the first layer. - View Dependent Claims (67)
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Specification