Stacked Transducing Devices

• US 20100246332A1
• Filed: 12/03/2008
• Published: 09/30/2010
• Est. Priority Date: 12/03/2007
• Status: Active Grant

• Current Assignee: Kolo Medical, Ltd.
• Original Assignee: Kolo Technologies, Inc.
• Inventors: Huang, Yongli
• Granted Patent: US 8,345,513 B2
• Time in Patent Office: Days
• US Class Current: 367/181
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 8/06 Measuring blood flow measuring volume flow in general G01F, e.g. G01F1/66, G01F1/72; measuring speed of fluids in general G01P5/00
• CPC Class Codes: A61B 8/12 in body cavities or body tracts, e.g. by using catheters catheters per se A61M25/00
• CPC Class Codes: A61B 8/445 Details of catheter construction
• CPC Class Codes: A61B 8/4488 the transducer being a phased array
• CPC Class Codes: A61N 1/37217 characterised by the communication link, e.g. acoustic or tactile
• CPC Class Codes: A61N 2007/0052 using the same transducer for therapy and imaging
• CPC Class Codes: A61N 7/02 Localised ultrasound hyperthermia hyperthermia in general A61F7/00
• CPC Class Codes: B06B 1/0292 Electrostatic transducers, e.g. electret-type

Abstract

Implementations include a capacitive micromachined ultrasonic transducer (CMUT) having an additional transducing device overlaid in a vertically stacked relationship. In some implementations the additional transducing device is a second CMUT configured to operate at a different frequency from the first CMUT.

Claims

1. A component comprising:

a first capacitive micromachined ultrasonic transducer (CMUT); and

a second transducing device contiguous with said first CMUT in a stacked relationship.

2. The component according to claim 1, wherein the second transducing device is a second CMUT.

3. The component according to claim 2, wherein the first CMUT comprises:

a first electrode;

a second electrode separated from the first electrode by a first gap maintained by one or more first supports; and

a spring member for enabling the first electrode and the second electrode to move toward and away from each other in the first gap.

4. The component according to claim 3,

wherein the second CMUT comprises the second electrode and a third electrode separated from the second electrode by a second gap on the opposite side of the second electrode from the first electrode, the second gap being maintained by one or more second supports.

5. The component according to claim 4,

wherein the third electrode is mounted on a flexible element that enables the third electrode to move toward and away from the second electrode in the second gap, said flexible element providing a spring force to return the third electrode toward an initial position.

6. The component according to claim 4,

wherein the third electrode is formed as part of a plate overlying the second electrode and the spring member, and separated therefrom by a second gap maintained by one or more second supports,

wherein the third electrode is configured to move toward and away from the second electrode, and

wherein the third electrode is located primarily over one or more of said first supports such that operation of the second CMUT has minimal effect on operation of the first CMUT.

7. The component according to claim 2,

wherein the first CMUT is configured to operate at a first frequency and the second CMUT is configured to operate at a second frequency, different from the first frequency.

8. The component according to claim 2,

wherein the first CMUT and the second CMUT share a common middle electrode.

9. The component according to claim 2,

wherein the first CMUT is connected to a reception circuit to receive acoustic energy, and

wherein the second CMUT is connected to a transmission circuit to transmit acoustic energy.

10. The component according to claim 2, further comprising:

wherein the first CMUT and the second CMUT are connected to a circuit for selectively connecting the first CMUT and second CMUT to one of;

a transmission circuit for enabling the first CMUT and second CMUT to transmit acoustic energy;

or

a reception circuit for enabling the first CMUT and the second CMUT to receive acoustic energy.

11. The component according to claim 2,

wherein the first CMUT and the second CMUT are connected in parallel,

wherein the first CMUT is connected to a first circuit for selectively connecting the first CMUT to one of a first transmission circuit or a first reception circuit, and

wherein the second CMUT is connected to a second circuit for selectively connecting the second CMUT to one of a second transmission circuit or a second reception circuit

12. The component according to claim 2,

wherein the first CMUT and the second CMUT are mounted on a probe;

wherein the first CMUT is configured as an imaging transducer for providing a field of view tissue during a surgical procedure, and

wherein the second CMUT is configured to focus ultrasonic energy on a desired area of tissue for carrying out tissue ablation during the surgical procedure.

13. The component according to claim 2,

wherein the first CMUT and the second CMUT are mounted on a probe;

wherein the first CMUT is configured as an imaging transducer for providing imaging at a first operation frequency, and

wherein the second CMUT is configured as an imaging transducer for providing imaging at a second operation frequency, different from the first operation frequency.

14. The component according to claim 1,

wherein the second transducing device is a flow/temperature sensor located on an upper plate of the first CMUT.

15. The component according to claim 1,

wherein the second transducing device is a flow/pressure sensor located on an upper plate of the first CMUT.

16. A component comprising:

a first electrode;

a second electrode separated from the first electrode by a first gap;

a spring member and one or more first supports for maintaining the first gap between the first electrode and the second electrode, wherein the first electrode and the second electrode are able to move toward each other, causing flexing of the spring member, and are moved away from each other by a restorative force of the spring member;

a third electrode separated from the second electrode by a second gap on an opposite side of the second electrode from the first electrode.

17. The component according to claim 16,

wherein the second electrode is a plate, and

wherein the third electrode is contiguous with a flexible element that is separated from the plate by one or more second supports,

wherein the flexible element enables the third electrode to move toward and away from the second electrode, said flexible element supplying an elastic force that returns the third electrode to a position away from the second electrode.

18. The component according to claim 16,

wherein the second electrode is contiguous with the spring member,

wherein the third electrode is separated from the second electrode and the spring member by one or more second supports,

wherein flexing of the third electrode enables the third electrode to move toward and away from the second electrode.

19. The component according to claim 18,

wherein the third electrode is located over one or more of said first supports such that movement of the third electrode toward and away from the second electrode has minimal effect on relative movement between the first and second electrodes.

20. The component according to claim 16,

wherein the first electrode and the second electrode comprise a first capacitive micromachined ultrasonic transducer (CMUT);

wherein the second electrode and the third electrode comprise a second CMUT; and

wherein the second electrode is connected to a bias or voltage source and serves as a common electrode to the first and second CMUTs.

21. A probe comprising:

a first transducer and a second transducer mounted on the probe, wherein the first transducer and the second transducer are contiguous and overlaid, one on top of the other.

22. The probe according to claim 21,

wherein the first transducer is a first capacitive micromachined ultrasonic transducer (CMUT) configured as an imaging transducer for providing a field of view during a surgical procedure, and

wherein the second transducer is a second CMUT configured to focus ultrasonic energy on a desired area of tissue for carrying out tissue ablation during the surgical procedure.

23. The probe according to claim 21,

wherein the first transducer is a first capacitive micromachined ultrasonic transducer (CMUT) configured as an imaging transducer for providing imaging at a first operation frequency, and

wherein the second transducer is a second CMUT configured as an imaging transducer for providing imaging at a second operation frequency, different from the first operation frequency.