Stacked Transducing Devices
First Claim
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1. A component comprising:
- a first capacitive micromachined ultrasonic transducer (CMUT); and
a second transducing device contiguous with said first CMUT in a stacked relationship.
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Abstract
Implementations include a capacitive micromachined ultrasonic transducer (CMUT) having an additional transducing device overlaid in a vertically stacked relationship. In some implementations the additional transducing device is a second CMUT configured to operate at a different frequency from the first CMUT.
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Citations
23 Claims
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1. A component comprising:
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a first capacitive micromachined ultrasonic transducer (CMUT); and a second transducing device contiguous with said first CMUT in a stacked relationship. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A component comprising:
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a first electrode; a second electrode separated from the first electrode by a first gap; a spring member and one or more first supports for maintaining the first gap between the first electrode and the second electrode, wherein the first electrode and the second electrode are able to move toward each other, causing flexing of the spring member, and are moved away from each other by a restorative force of the spring member; a third electrode separated from the second electrode by a second gap on an opposite side of the second electrode from the first electrode. - View Dependent Claims (17, 18, 19, 20)
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21. A probe comprising:
a first transducer and a second transducer mounted on the probe, wherein the first transducer and the second transducer are contiguous and overlaid, one on top of the other. - View Dependent Claims (22, 23)
Specification