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EXPOSURE SYSTEM, METHOD OF TESTING EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

  • US 20100249980A1
  • Filed: 03/23/2010
  • Published: 09/30/2010
  • Est. Priority Date: 03/25/2009
  • Status: Active Grant
First Claim
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1. An exposure system configured to update control software installed on an exposure apparatus to new control software, the system comprising:

  • at least one exposure apparatus;

    a simulator configured to test an operation of said exposure apparatus;

    an output unit configured to output configuration information of said exposure apparatus, which includes information representing a temporal change of said exposure apparatus;

    a reflecting unit configured to reflect the temporal change of said exposure apparatus on said simulator based on the configuration information output from said output unit; and

    an updating unit configured to update control software installed on said simulator to new control software.

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