MULTIPLEXED LATCHING VALVES FOR MICROFLUIDIC DEVICES AND PROCESSORS
First Claim
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1. A membrane latching valve structure comprising:
- first and second input channels;
a first membrane valve having an input in fluid communication with the first input channel and a control of the first membrane valve in fluid communication with atmospheric;
a second membrane valve having an input in fluid communication with the first input channel, an output in fluid communication with an output of the first membrane valve, and a control in fluid communication with the second input channel;
a third membrane valve having a control in fluid communication with the output of the first membrane valve and the output of the second membrane valve;
such that when a sufficient vacuum is applied to the first and second input channels, the third membrane valve moves to an open position and is latched in that position when the vacuum is removed; and
such that when a sufficient pressure is applied to the first and second input channels, the third membrane valve moves to a closed position and is latched in that position when the pressure is removed.
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Abstract
Membrane valves and latching valve structures for microfluidic devices are provided. A demultiplexer can be used to address the latching valve structures. The membrane valves and latching valve structures may be used to form pneumatic logic circuits, including processors.
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Citations
17 Claims
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1. A membrane latching valve structure comprising:
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first and second input channels; a first membrane valve having an input in fluid communication with the first input channel and a control of the first membrane valve in fluid communication with atmospheric; a second membrane valve having an input in fluid communication with the first input channel, an output in fluid communication with an output of the first membrane valve, and a control in fluid communication with the second input channel; a third membrane valve having a control in fluid communication with the output of the first membrane valve and the output of the second membrane valve; such that when a sufficient vacuum is applied to the first and second input channels, the third membrane valve moves to an open position and is latched in that position when the vacuum is removed; and such that when a sufficient pressure is applied to the first and second input channels, the third membrane valve moves to a closed position and is latched in that position when the pressure is removed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A membrane valve structure comprising:
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a first input channel formed in a first surface of a first substrate; a second input channel formed in a second surface of a second substrate; a pressure valve having a control formed in the first surface and fluidly connected with atmospheric, and an input and output formed in the second surface wherein the input is fluidly connected to the second input channel; a vacuum valve having a control formed in the first surface and fluidly connected to a first input channel, and input and an output formed in the second surface such that the input is fluidly connected to the second input channel; a latching valve having an input and output formed in the first surface, and a control formed in the second surface such that the control is fluidly connected to the output of the vacuum valve; and an elastomer membrane located between the first and second surfaces at the area of the control of each of the pressure, vacuum and latching valves such that the application of a pressure or a vacuum to the first and second input channels causes the membrane to deflect to modulate a flow of a fluid through the valves.
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13. A microfluidic logic circuit comprising:
an array of membrane valves, each valve including a valve input, a valve output, a valve control, and an elastomer membrane wherein the application of a pressure or a vacuum can cause the membrane to deflect to modulate a flow of fluid through the valve, and wherein the membrane valves are connected in fluid communication with each other such that a pneumatic input to the array or membrane valves is logically operated upon to produce a pneumatic output. - View Dependent Claims (14, 15, 16, 17)
Specification