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INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTROMAGNETIC WAVE

  • US 20100252738A1
  • Filed: 11/27/2008
  • Published: 10/07/2010
  • Est. Priority Date: 11/30/2007
  • Status: Active Grant
First Claim
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1. An apparatus for acquiring information on a time wave form of a terahertz wave, comprising:

  • a generating unit for generating a terahertz wave;

    a detecting unit for detecting waveform information of a terahertz wave generated by the generating unit;

    a distance changing unit for changing a first position in the generating unit into a third position therein or a second position in the detecting unit into a fourth position to change a propagating distance of the terahertz wave from the first position to the second position; and

    a control unit for controlling the distance changing unit so that first waveform information of the terahertz wave generated at the first position is detected and subsequently, second waveform information of the terahertz wave generated at the third position is detected at the second position or second waveform information of the terahertz wave generated at the first position is detected at the fourth position,wherein information on the time waveform of the terahertz wave is acquired by using the first and second waveform information detected in the detecting unit.

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