SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
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1. A spatial light modulating unit comprising:
- a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually; and
angle varying unit which varies a relative angle between a diffracted light generating region to generate diffracted light around each of the plurality of optical elements, and incident light to the diffracted light generating region.
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Abstract
There is disclosed a spatial light modulating unit comprising:
a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually; and an angle varying unit which varies a relative angle between a diffracted light generating region to generate diffracted light around each of the plurality of optical elements, and incident light to the diffracted light generating region.
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Citations
21 Claims
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1. A spatial light modulating unit comprising:
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a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually; and angle varying unit which varies a relative angle between a diffracted light generating region to generate diffracted light around each of the plurality of optical elements, and incident light to the diffracted light generating region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 17, 18, 19, 20, 21)
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16. An illumination optical system which illuminates an illumination target surface on the basis of light from a light source, said illumination optical system comprising:
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a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, and a diffracted light generating region which generates diffracted light around each of the plurality of optical elements; and a light-guiding optical system which guides the light from the light source to the spatial light modulator, wherein a posture of at least one of the spatial light modulator and at least a part of the light-guiding optical system is variable in order to vary a relative angle between the diffracted light generating region and incident light to the diffracted light generating region.
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Specification