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MIRROR ARRAYS FOR MASKLESS PHOTOLITHOGRAPHY AND IMAGE DISPLAY

  • US 20100255426A1
  • Filed: 04/06/2009
  • Published: 10/07/2010
  • Est. Priority Date: 04/06/2009
  • Status: Active Grant
First Claim
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1. A micromirror having an exposed surface area, the micromirror comprising:

  • a polymeric mirror base;

    a reflective dielectric multilayer disposed over the polymeric mirror base; and

    a device layer positioned below the polymeric mirror base for adjusting a position of the micromirror;

    wherein the reflective dielectric multilayer covers more than 50% of the exposed surface area and the reflective dielectric multilayer has a reflectivity selected over the range of 90% to 100% for at least a portion of electromagnetic radiation having wavelengths in the range of 150 to 1100 nm.

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