Gyroscopes Using Surface Electrodes
First Claim
1. A microelectromechanical systems (MEMS) gyroscope comprising:
- a top substrate including;
an outermost structure, the outermost structure being open and enclosed, anda first driving structure disposed within the outermost structure, the first driving structure including first driving electrodes disposed on a bottom surface of the first driving structure; and
a bottom substrate disposed below the top substrate, the bottom substrate including second driving electrodes disposed on a top surface of the bottom substrate, the second driving electrodes substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes, where the first and second driving electrodes are further configured to provide a capacitance signal based on the movement of the first driving structure, the capacitance signal being generated based on the first driving structure moving relative to the second driving electrodes.
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Abstract
Gyroscopes using surface electrodes are provided. In this regard, a representative microelectromechanical systems (MEMS) gyroscope, among others, includes a top substrate and a bottom substrate. The top substrate includes an outermost structure that is open and enclosed and a first driving structure that is disposed within the outermost structure and includes first driving electrodes disposed on a bottom surface. The bottom substrate is disposed below the top substrate and includes second driving electrodes disposed on a top surface of the bottom substrate. The second driving electrodes are substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes. The first and second driving electrodes are also configured to provide a capacitance signal based on the movement of the first driving structure.
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Citations
20 Claims
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1. A microelectromechanical systems (MEMS) gyroscope comprising:
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a top substrate including; an outermost structure, the outermost structure being open and enclosed, and a first driving structure disposed within the outermost structure, the first driving structure including first driving electrodes disposed on a bottom surface of the first driving structure; and a bottom substrate disposed below the top substrate, the bottom substrate including second driving electrodes disposed on a top surface of the bottom substrate, the second driving electrodes substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes, where the first and second driving electrodes are further configured to provide a capacitance signal based on the movement of the first driving structure, the capacitance signal being generated based on the first driving structure moving relative to the second driving electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microelectromechanical systems (MEMS) gyroscope comprising:
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a top substrate including; an outermost structure, the outermost structure being open and enclosed, a first sensing structure disposed within the outermost structure, the first sensing structure including first sensing electrodes disposed on a bottom surface of the first sensing structure along at least one side wall of the first sensing structure, the first sensing electrodes being aligned substantially parallel to the at least one side wall of the first sensing structure, and a first driving structure that is disposed within the first sensing structure, the first driving structure including first driving electrodes disposed on a bottom surface of the first driving structure; and a bottom substrate disposed below the top substrate, the bottom substrate including second driving electrodes disposed on a top surface of the bottom substrate, the second driving electrodes substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes, where the first and second driving electrodes are further configured to provide a capacitance signal based on the movement of the first driving structure, the capacitance signal being generated based on the first driving structure moving relative to the second driving electrodes. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification