APPARATUS AND METHOD FOR USING A VISCOELASTIC CLEANING MATERIAL TO REMOVE PARTICLES ON A SUBSTRATE

• US 20100258142A1
• Filed: 04/14/2009
• Published: 10/14/2010
• Est. Priority Date: 04/14/2009
• Status: Abandoned Application

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Mui, David, Wilcoxson, Mark, Kawaguchi, Mark Naoshi
• Application Number:
  US12/423,759
• Publication Number:
  US 20100258142A1
• Time in Patent Office: Days
• US Class Current: 134/1.300
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: B08B 5/04 Cleaning by suction, with or without auxiliary action B08B9/035 takes precedence; suction cleaners A47L
• CPC Class Codes: H01L 21/02052 Wet cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/02057 Cleaning during device manufacture
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

The embodiments provide apparatus and methods for removing particles from a substrate surface, especially from a surface of a patterned substrate (or wafer). The cleaning apparatus and methods have advantages in cleaning patterned substrates with fine features without substantially damaging the features on the substrate surface. The cleaning apparatus and methods involve using a viscoelastic cleaning material containing a polymeric compound with large molecular weight, such as greater than 10,000 g/mol. The viscoelastic cleaning material entraps at least a portion of the particles on the substrate surface. The application of a force on the viscoelastic cleaning material over a sufficiently short period time causes the material to exhibit solid-like properties that facilitate removal of the viscoelastic cleaning material along with the entrapped particles. A number of forces can be applied over a short period to access the solid-like nature of the viscoelastic cleaning material. Alternatively, when the temperature of the viscoelastic cleaning material is lowered, the visoelastic cleaning material also exhibits solid-like properties.

Claims

1. A method of removing particles from a surface of a substrate, comprising:

dispensing a layer of a cleaning material on the surface of the substrate, wherein the substrate is rotated by a substrate support, and wherein the cleaning material is a viscoelastic solution which includes a polymeric compound, the polymeric compound being soluble in a cleaning solution to form the cleaning material, the cleaning material captures and entraps at least some of the particles from the surface of the substrate; and

dispensing a rinsing liquid on the layer of the cleaning material on the surface of the substrate to remove the layer of cleaning material, wherein an energy is applied on the cleaning material during or prior to dispensing the rinsing liquid on the layer of the cleaning material, wherein the energy applied increases a solid-like response of the cleaning material to facilitate removal of the cleaning material from the substrate surface, and wherein the at least some of the particles that are entrapped by the cleaning material are removed along with the cleaning material.

2. The method of claim 1, wherein the energy is introduced by a force applied on the layer of the cleaning material during the dispensing of the rinsing liquid, wherein dispensed rinsing liquid removes the layer of the cleaning material.

3. The method of claim 1, wherein the substrate and the cleaning material are cooled to a temperature between about 0°

C. to about 30°

C. prior to and during dispensing the rinsing liquid, and wherein cooling of the cleaning material increases the solid-like response of the cleaning material to make the cleaning material and the entrapped particles easier to remove by the dispensed rinsing liquid.

4. The method of claim 1, wherein the energy introduced is applied by a suction force on the layer of the cleaning material, and wherein the suction force pulls the layer of the cleaning material away from the surface of the substrate to remove the cleaning material and the entrapped particles

5. The method of claim 1, wherein a surface pre-treatment liquid is applied on the surface of the substrate prior to the layer of the cleaning material is dispensed on the surface of the substrate.

6. The method of claim 1, wherein the energy introduced in a low frequency acoustic energy whose frequency is greater than a reciprocal of a characteristic time of the cleaning material, and wherein the frequency is between about 10 Hz to about 500 Hz.

7. The method of claim 1, wherein the rinsing liquid is dispensed on the layer of the cleaning material by a spray jet, and wherein the spray jet introduced the energy applied on the cleaning material by the force of the spray jet.

8. The method of claim 1, wherein the energy introduced in a megasonic or ultrasonic acoustic energy whose frequency is greater than a reciprocal of a characteristic time of the cleaning material.

9. The method of claim 1, wherein the energy is introducing by oscillating the substrate around an axis of the substrate during or after the layer of the cleaning material is dispensed on the surface of the substrate.

10. The method of claim 1, wherein the polymeric compound is selected from the group consisting of acrylic polymers, such as polyacrylamide (PAM), polyacrylic acid (PAA), such as Carbopol 940™

and Carbopol 941™

, copolymers of PAM and PAA, poly-(N,N-dimethyl-acrylamide) (PDMAAm), poly-(N-isopropyl-acrylamide) (PIPAAm), polymethacrylic acid (PMAA), polymethacrylamide (PMAAm), polyimines and oxides, such as polyethylene imine (PEI), polyethylene oxide (PEO), polypropylene oxide (PPO), vinyl polymers, such as polyvinyl alcohol (PVA), polyethylene sulphonic acid (PESA), polyvinylamine (PVAm), polyvinyl-pyrrolidone (PVP), poly-4-vinyl pyridine (P4VP), cellulose derivatives, such as methyl cellulose (MC), ethyl-cellulose (EC), hydroxyethyl cellulose (HEC), carboxymethyl cellulose (CMC), polysaccharides, such as acacia, agar and agarose, heparin, guar gum, xanthan gum, and proteins such as albumen, collagen, and gluten.

11. The method of claim 1, wherein the rinse liquid is de-ionized water.

12. The method of claim 3, wherein the substrate and the cleaning material are cooled by spraying cold water on the backside of the substrate or substrate support.

13. The method of claim 5, wherein the pre-treatment liquid is selected from a group consisting of de-ionized water (DIW), APM (ammonium peroxide mixture), DSP (diluted sulfuric-acid peroxide mixture), SPM (sulfuric-acid peroxide mixture), DI-O3 (de-ionized water mixed with ozone), HF (hydrogen fluoride), and BOE (buffered oxide etch) solution.

14. The method of claim 7, wherein the rinse liquid is mixed with a carrier gas in the spray jet, and wherein the carrier gas is selected from a group consisting of N₂, air, O₂, Ar, He, other types of inert gas, and a combination of the above mentioned gases.

15. The method of claim 8, wherein the frequency of the megasonic or ultrasonic acoustic energy is selected from a group consisting of about 28 kHz, about 44 kHz, about 112 kHz, about 800 kHz, about 1.4 MHz, and about 2 MHz.

16. The method of claim 8, wherein the oscillatory frequency is greater than a reciprocal of a characteristic time of the cleaning material.

17. The method of claim 1, further comprising:

applying a drying-assisting liquid on the surface of the substrate after the layer of the cleaning material has been removed; and

drying the surface of the substrate after the dry-assisting liquid has been applied by rotating the substrate.

18. The method of claim 1, wherein the drying-assisting liquid is isopropyl alcohol (IPA), a mixture of IPA and water, a vapor phase IPA, or a mixture of vapor phase IPA and an inert gas.

19. A method of removing particles from a surface of a substrate, comprising:

dispensing a layer of a viscoelastic cleaning material on the surface of the substrate, wherein the substrate is rotated by a substrate support, and wherein the viscoelastic cleaning material captures and entraps at least some of the particles from the surface of the substrate; and

dispensing a rinsing liquid on the layer of the cleaning material on the surface of the substrate to remove the layer of cleaning material, wherein an energy is applied on the cleaning material during or prior to dispensing the rinse liquid on the layer of the cleaning material, wherein the energy applied increases a solid-like response of the cleaning material to facilitate removal of the cleaning material from the substrate surface, and wherein the at least some of the particles that are entrapped by the cleaning material are removed along with the cleaning material.

20. A method of removing particles from a surface of a substrate in an apparatus having a number of processing slots, comprising:

moving the substrate to a first processing slot of the apparatus by a substrate support, wherein the first processing slot of the apparatus is separated from the processing slots below the first processing slot by the substrate support;

dispensing a layer of a viscoelastic cleaning material on the surface of the substrate, wherein the substrate is rotated by a substrate support, and wherein the viscoelastic cleaning material captures and entraps at least some of the particles from the surface of the substrate;

moving the substrate to a second processing slot of the apparatus by the substrate support, wherein the second processing slot of the apparatus is separated from the processing slots below the second processing slot by the substrate support; and

dispensing a rinsing liquid on the layer of the cleaning material on the surface of the substrate to remove the layer of the viscoelastic cleaning material, wherein an energy is applied on the cleaning material during or prior to dispensing the rinse liquid on the layer of the cleaning material, wherein the energy applied increases a solid-like response of the cleaning material to facilitate removal of the cleaning material from the substrate surface, and wherein the at least some of the particles that are entrapped by the cleaning material are removed along with the cleaning material.

21. The method of claim 20, further comprising:

moving the substrate to a third processing slot of the apparatus by the substrate support, wherein the third processing slot of the apparatus is separated from the processing slots below the second processing slot by the substrate support or the backside of the substrate support becomes an exterior of the apparatus;

applying a drying-assisting liquid on the surface of the substrate that has been removed of the layer of the viscoelastic cleaning material, wherein the substrate spins when the drying-assisting liquid is rotated during the drying-assisting liquid is being applied; and

drying the substrate by spinning the substrate after the drying-assisting liquid has been applied.

22. The method of claim 20, wherein the backside of the substrate support is sprayed with a cold liquid to lower the temperature of the substrate and the layer of cleaning material before and during the rinse liquid is applied on the layer of the viscoelastic cleaning material, and wherein lowering the temperature of the layer of the viscoelastic cleaning material increases the elastic nature of the cleaning material.

24. The method of claim 20, wherein the energy is applied by a vacuum suction on the layer of the viscoelastic cleaning material prior to dispensing the rinse liquid when the substrate is in the first or the second processing slot.

25. The method of claim 20, wherein the rinsing liquid is dispensed by a spray jet, and the energy is applied on the layer of the viscoelastic cleaning material by the spray jet.

26. The method of claim 20, wherein the energy is an acoustic energy with a frequency greater than a reciprocal of a characteristic time of the viscoelastic cleaning material.