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APPARATUS AND METHOD FOR USING A VISCOELASTIC CLEANING MATERIAL TO REMOVE PARTICLES ON A SUBSTRATE

  • US 20100258142A1
  • Filed: 04/14/2009
  • Published: 10/14/2010
  • Est. Priority Date: 04/14/2009
  • Status: Abandoned Application
First Claim
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1. A method of removing particles from a surface of a substrate, comprising:

  • dispensing a layer of a cleaning material on the surface of the substrate, wherein the substrate is rotated by a substrate support, and wherein the cleaning material is a viscoelastic solution which includes a polymeric compound, the polymeric compound being soluble in a cleaning solution to form the cleaning material, the cleaning material captures and entraps at least some of the particles from the surface of the substrate; and

    dispensing a rinsing liquid on the layer of the cleaning material on the surface of the substrate to remove the layer of cleaning material, wherein an energy is applied on the cleaning material during or prior to dispensing the rinsing liquid on the layer of the cleaning material, wherein the energy applied increases a solid-like response of the cleaning material to facilitate removal of the cleaning material from the substrate surface, and wherein the at least some of the particles that are entrapped by the cleaning material are removed along with the cleaning material.

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