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FRONT END MICRO CAVITY

  • US 20100258882A1
  • Filed: 04/10/2009
  • Published: 10/14/2010
  • Est. Priority Date: 04/10/2009
  • Status: Active Grant
First Claim
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1. A method of forming one or more micro cavities, each micro cavity comprising a micro electrical mechanical system (MEMS), in a process further forming at least one semiconductor component in parallel with the micro cavity and having process steps in common, comprising a step of:

  • releasing the micro cavity after the formation of the at least one semiconductor component is finished.

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