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Methods of Selecting Sensors for Detecting Abnormalities in Semiconductor Manufacturing Processes

  • US 20100262398A1
  • Filed: 04/14/2010
  • Published: 10/14/2010
  • Est. Priority Date: 04/14/2009
  • Status: Abandoned Application
First Claim
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1. A method of selecting at least one of a plurality of sensors that are used in a semiconductor manufacturing process, the method comprising:

  • measuring responses of the plurality of sensors when a first of a plurality of process conditions is varied;

    identifying one or more of the plurality of sensors that have a steady state response after the first of the process conditions is varied; and

    selecting a sensor having the highest value within a response range from among the sensors having the steady state response for the first process condition that is varied.

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