RECESSED CHANNEL ARRAY TRANSISTOR (RCAT) STRUCTURES AND METHOD OF FORMATION
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Abstract
Recessed channel array transistor (RCAT) structures and method of formation are generally described. In one example, an electronic device includes a semiconductor substrate, a first fin coupled with the semiconductor substrate, the first fin comprising a first source region and a first drain region, and a first gate structure of a recessed channel array transistor (RCAT) formed in a first gate region disposed between the first source region and the first drain region, wherein the first gate structure is formed by removing a sacrificial gate structure to expose the first fin in the first gate region, recessing a channel structure into the first fin, and forming the first gate structure on the recessed channel structure.
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Citations
15 Claims
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1-7. -7. (canceled)
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8. An apparatus comprising:
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a semiconductor substrate; a first fin coupled with the semiconductor substrate, the first fin comprising a first source region and a first drain region; and a first gate structure of a recessed channel array transistor (RCAT) formed in a first gate region disposed between the first source region and the first drain region, wherein the first gate structure is formed by removing a sacrificial gate structure to expose the first fin in the first gate region, recessing a channel structure into the first fin, and forming the first gate structure on the recessed channel structure. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15-20. -20. (canceled)
Specification