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MEMS DEVICE WITH INDEPENDENT ROTATION IN TWO AXES OF ROTATION

  • US 20100265555A1
  • Filed: 06/30/2010
  • Published: 10/21/2010
  • Est. Priority Date: 04/29/2008
  • Status: Active Grant
First Claim
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1. A MEMS arrangement comprising:

  • a plurality of MEMS devices arranged in an array, each MEMS device of the plural MEMS devices being adjacent to at least an adjacent MEMS device, and each MEMS device comprising;

    a substrate;

    a first rotatable element;

    a support structure anchored to a substrate;

    at least one support element that supports the first rotatable element to the support structure so as to be rotatable with respect to the support structure in a first axis of rotation;

    wherein a first support element of said at least one support element is configured to extend laterally to be at least partially within an outline of an adjacent MEMS device.

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