SEMICONDUCTOR LAYER STRUCTURE
First Claim
1. A III-nitride semiconductor multilayer structure, wherein a first layer of the structure comprises a layer of single crystal AlInN having a non-zero In content, the AlInN layer having at least one aperture whereby the AlInN layer does not extend over the area of the multilayer structure.
1 Assignment
0 Petitions
Accused Products
Abstract
A III-nitride compound device which has a layer of AlInN (7) having a non-zero In content, for example acting as a current blocking layer, is described. The layer of AlInN (7) has at least aperture defined therein. The layer of AlInN (7) is grown with a small lattice-mismatch with an underlying layer, for example an underlying GaN layer, thus preventing added crystal strain in the device. By using optimised growth conditions the resistivity of the AlInN is made higher than 102 ohm·cm thus preventing current flow when used as a current blocking layer in a multilayer semiconductor device with layers having smaller resistivity. As a consequence, when the AlInN layer has an opening and is placed in a laser diode device, the resistance of the device is lower resulting in a device with better performance.
-
Citations
25 Claims
- 1. A III-nitride semiconductor multilayer structure, wherein a first layer of the structure comprises a layer of single crystal AlInN having a non-zero In content, the AlInN layer having at least one aperture whereby the AlInN layer does not extend over the area of the multilayer structure.
-
24. A method of growing a layer of single-crystal AlInN having a non-zero In content, the method comprising the steps of:
-
providing an (Al,Ga,In)N substrate into an MBE growth chamber; raising the substrate temperature to a desired growth temperature; supplying activated nitrogen to a surface of the (AI,Ga,In)N substrate; and supplying Al and In to the growth chamber. - View Dependent Claims (25)
-
Specification