×

APPARATUS OF INSPECTING DEFECT IN SEMICONDUCTOR AND METHOD OF THE SAME

  • US 20100268482A1
  • Filed: 06/30/2010
  • Published: 10/21/2010
  • Est. Priority Date: 07/20/2005
  • Status: Active Grant
First Claim
Patent Images

1. A defect inspection apparatus comprising:

  • an illumination unit for illuminating light to an object to be inspected,a detection unit for detecting scattered light from the object to be inspected,a signal processing unit for detecting a defect by processing a detection signal of the scattered light detected by the detection unit, calculating size of the defect detected by the defect detection unit, and calibrating the size of the defect calculated by the calculating, by using a relationship between a size of a defect whose size is known and a size of the defect calculated.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×