ANGULAR VELOCITY DETECTING DEVICE
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Abstract
A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
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Citations
13 Claims
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1-9. -9. (canceled)
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10. An angular rate detecting device comprising:
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a base layer; an interlayer provided on the base layer, a fixed part provided on the interlayer; a drive frame provided on a same layer as the fixed part, suspended from the fixed part via a first beam, a second beam, and a third beam, and suspended from the fixed part via a fourth beam, a fifth beam, and a sixth beam; a Coriolis frame provided on the same layer as the fixed part, and suspended from the fixed part via the drive frame and a seventh beam, wherein, when a direction on a surface of the base layer is taken as an x-axis direction and a direction perpendicular to the x-axis direction on the surface of the base layer is taken as a y-axis direction, the first beam, having one end connected to the fixed part and another end connected to the second beam, is extended in the y-axis direction, the second beam is extended in the x-axis direction, the third beam, having one end connected to the second beam and another end connected to the drive frame, is extended in the y-axis direction with a predetermined space from the first beam in the x-axis direction, the fourth beam, having one end connected to the fixed part and another end connected to the fifth beam, is extended in the y-axis direction, the fifth beam is extended in the x-axis direction, the sixth beam, having one end connected to the fifth beam and another end connected to the drive frame, is extended in the y-axis direction with the predetermined space from the fourth beam in the x-axis direction, and the second beam and the fifth beam are disposed to opposite sides of the fixed part in the y-axis direction. - View Dependent Claims (11, 12, 13)
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Specification