SENSOR SYSTEM

• US 20100269590A1
• Filed: 03/23/2010
• Published: 10/28/2010
• Est. Priority Date: 04/22/2009
• Status: Abandoned Application

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Materna, Volker, GUENTHER, Sebastian, Ulbrich, Nicolaus
• Application Number:
  US12/729,992
• Publication Number:
  US 20100269590A1
• Time in Patent Office: Days
• US Class Current: 73/514.150
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 7/0077 Other packages not provided for in groups B81B7/0035 - B81B7/0074
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2224/48472 the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H05K 7/20463 Filling compound, e.g. potted resin

Abstract

A sensor system, in particular an acceleration sensor system, includes a sensor element and a cover element, at least one side of the sensor element having a covering provided by the cover element, and the cover element being at least partially designed as an infrared-protection element.

Claims

1. A sensor system, comprising:

a sensor element; and

a cover element, at least one side of the sensor element having a covering provided by the cover element, the cover element being at least partially designed as an infrared-protection element.

2. The sensor system according to claim 1, wherein the cover element has a capping wafer, a doped region of the capping wafer being provided as an infrared-protection element.

3. The sensor system according to claim 1, wherein the cover element encompasses at least one of a sensor housing and a sensor housing cover, the sensor element being configured at least partially within the sensor housing.

4. The sensor system according to claim 1, wherein a sensor housing cover that is thermally insulated from at least one of a sensor housing and the sensor element is provided as an infrared-protection element.

5. The sensor system according to claim 1, wherein the cover element includes a potting compound, which is situated at least one of (a) between a sensor housing and the sensor element and (b) between a sensor housing cover and the sensor element.

6. The sensor system according to claim 5, wherein the potting compound contains ruthenium oxide.

7. The sensor system according to claim 1, wherein the infrared-protection element encompasses a reflection and/or absorption element.

8. The sensor system according to claim 1, wherein the infrared-protection element includes at least one of a doped region, a metal layer, a dielectric layer, a dielectric layer stack and a plastic element.

9. The sensor system according to claim 1, wherein the infrared-protection element is situated on a side of the cover element facing the sensor element or on a side of the cover element facing away from the sensor element.

10. The sensor system according to claim 1, wherein the cover element includes at least one of (a) a doped region, (b) a coating of the sensor element and (c) a coating of a seismic mass of the sensor element.

11. The sensor system according to claim 1, wherein the sensor element includes an acceleration sensor that is sensitive, perpendicularly or in parallel to a main extension plane of a substrate of the sensor element.

12. The sensor system according to claim 1, wherein the sensor element has a seismic mass designed as a rocker structure having an asymmetrical mass distribution.

13. The sensor system according to claim 1, wherein the sensor system is an acceleration sensor system.