AUTOMATIC POSITIONING AND SENSING MICROELECTRODE ARRAYS
First Claim
1. A microelectrode sensing device, comprising:
- a substrate; and
an array of microelectrode sensors formed on the substrate, each sensor comprisinga first conductive layer, that at least partially conducts electricity, formed above the substrate and patterned to comprise a recording electrode to measure electrical activities of one or more target cells in a solution; and
a second conductive layer, that at least partially conducts electricity, elevated above the first layer and patterned to comprise a plurality of positioning electrodes arranged to define a sensing region above the recording electrode in which the solution is located, the positioning electrodes operable to generate an electric field pattern in the sensing region to move and confine the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode.
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Abstract
A microelectrode sensing device includes a substrate and an array of microelectrode sensors. Each sensor includes a first conductive layer that at least partially conducts electricity. The first conductive layer is formed above the substrate and patterned to include a recording electrode that measures electrical activities of target cells. Each sensor also includes a second conductive layer that at least partially conducts electricity. The second conductive layer is elevated above the first layer and patterned to include multiple positioning electrodes arranged to define a sensing region above the recording electrode. The positioning electrodes are designed to generate an electric field pattern in the sensing region to move and confine the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode.
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Citations
47 Claims
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1. A microelectrode sensing device, comprising:
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a substrate; and an array of microelectrode sensors formed on the substrate, each sensor comprising a first conductive layer, that at least partially conducts electricity, formed above the substrate and patterned to comprise a recording electrode to measure electrical activities of one or more target cells in a solution; and a second conductive layer, that at least partially conducts electricity, elevated above the first layer and patterned to comprise a plurality of positioning electrodes arranged to define a sensing region above the recording electrode in which the solution is located, the positioning electrodes operable to generate an electric field pattern in the sensing region to move and confine the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method comprising:
providing a microelectrode sensing device including forming a recording electrode in a first conductive layer, that at least partially conducts electricity, over a substrate; arranging a plurality of positioning electrodes in a second conductive layer, that at least partially conducts electricity, over the recording electrode to define a sensing region over the recording electrode and reduce capacitive or inductive interference; adding a passivation material at least between the first and second conductive layers arranged to retain one or more target cells in a solution; using the positioning electrodes to apply an electric field pattern that moves and confines the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode; and using the recording electrode to record electrical activities of the confined cells. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A microelectrode sensing device, comprising:
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a substrate; and an array of microelectrode sensors formed on the substrate, each sensor comprising; a first layer formed over the substrate and patterned to comprise a sensing electrode which measures electrical activities of one or more target cells in a solution above the first layer; a second layer elevated above the first layer and patterned to comprise a plurality of positioning electrodes arranged to define a sensing region on top of the sensing electrode in which the solution is located, the positioning electrodes operable to generate an electric field pattern in the sensing region to move and confine the target cells above the sensing electrode; and an insulator material filled between the first and the second layers to electrically insulate the sensing electrode from the positioning electrodes, the insulator material shaped to define at least one channel between the first and the second layers to contain the solution, wherein the sensing region is located in the channel. - View Dependent Claims (33, 34, 35, 36, 37)
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38. A microelectrode sensing device, comprising:
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a substrate; and an array of microelectrode sensors formed on the substrate, each sensor comprising a first conductive layer, that at least partially conducts electricity, formed above the substrate and patterned to comprise a recording electrode to measure electrical activities of one or more target cells in a solution; and a plurality of positioning electrodes arranged to define a sensing region above the recording electrode in which the solution is located, the positioning electrodes operable to generate an electric field pattern in the sensing region to move and confine the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode. - View Dependent Claims (39, 40, 41, 42, 43, 45, 46)
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44. A microelectrode sensing device, comprising:
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a substrate; and an array of microelectrode sensors formed on the substrate, each sensor comprising a first conductive layer, that at least partially conducts electricity, formed above the substrate and patterned to comprise a recording electrode configured to measure electrical activities of one or more target cells in a solution and generate an electric field pattern in a sensing region above the recording electrode to pull and confine the target cells to a sub-region of the sensing region that at least partially overlaps the recording electrode. - View Dependent Claims (47)
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Specification