Method for producing a vertical transistor component
First Claim
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1. A vertical transistor component comprising:
- a semiconductor substrate;
a gate electrode disposed above the semiconductor substrate and insulated from the semiconductor substrate;
a monocrystalline semiconductor layer disposed adjacent to the gate electrode in a lateral direction and insulated from the gate electrode, the monocrystalline semiconductor layer extending in a vertical direction as far as the semiconductor substrate; and
a connection electrode arranged adjacent to the monocrystalline semiconductor layer above the semiconductor substrate, wherein the connection electrode makes contact with the semiconductor substrate in a region of a semiconductor zone that is doped complementarily with respect to remaining regions of the semiconductor substrate.
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Abstract
A method for producing a vertical transistor component includes providing a semiconductor substrate, applying an auxiliary layer to the semiconductor substrate, and patterning the auxiliary layer for the purpose of producing at least one trench which extends as far as the semiconductor substrate and which has opposite sidewalls. The method further includes producing a monocrystalline semiconductor layer on at least one of the sidewalls of the trench, producing an electrode insulated from the monocrystalline semiconductor layer on the at least one sidewall of the trench and the semiconductor substrate.
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Citations
18 Claims
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1. A vertical transistor component comprising:
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a semiconductor substrate; a gate electrode disposed above the semiconductor substrate and insulated from the semiconductor substrate; a monocrystalline semiconductor layer disposed adjacent to the gate electrode in a lateral direction and insulated from the gate electrode, the monocrystalline semiconductor layer extending in a vertical direction as far as the semiconductor substrate; and a connection electrode arranged adjacent to the monocrystalline semiconductor layer above the semiconductor substrate, wherein the connection electrode makes contact with the semiconductor substrate in a region of a semiconductor zone that is doped complementarily with respect to remaining regions of the semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 9, 10)
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8. A vertical transistor component comprising:
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a semiconductor substrate; a gate electrode disposed above the semiconductor substrate and insulated from the semiconductor substrate; a monocrystalline semiconductor layer disposed adjacent to the gate electrode in a lateral direction and insulated from the gate electrode, the monocrystalline semiconductor layer extending in a vertical direction as far as the semiconductor substrate, and wherein the monocrystalline semiconductor layer has a body zone doped complementarily with respect to the semiconductor substrate and a source zone adjoining the body zone in the vertical direction of a same conduction type as the semiconductor substrate, and wherein the connection electrode short-circuits the source zone and the body zone; a connection electrode arranged adjacent to the monocrystalline semiconductor layer above the semiconductor substrate, wherein the connection electrode makes contact with the semiconductor substrate in a region of a semiconductor zone that is doped complementarily with respect to remaining regions of the semiconductor substrate; and an insulation layer configured to insulate the connection electrode from the monocrystalline semiconductor layer. - View Dependent Claims (11, 12, 13)
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14. A vertical transistor component comprising:
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a semiconductor substrate; a gate electrode disposed above the semiconductor substrate and insulated from the semiconductor substrate; a monocrystalline semiconductor layer disposed adjacent to the gate electrode in a lateral direction and insulated from the gate electrode, the monocrystalline semiconductor layer extending in a vertical direction as far as the semiconductor substrate, and wherein the monocrystalline semiconductor layer extends beyond the gate electrode in the vertical direction; a connection electrode arranged adjacent to the monocrystalline semiconductor layer above the semiconductor substrate, wherein the connection electrode makes contact with the semiconductor substrate in a region of a semiconductor zone that is doped complementarily with respect to remaining regions of the semiconductor substrate; and an insulation layer configured to insulate the connection electrode from the monocrystalline semiconductor layer. - View Dependent Claims (15, 16, 17, 18)
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Specification