Side Seal for Wet Lens Elements
First Claim
1. A projection optics system within an immersion lithography system comprising:
- a series of optical elements;
a wet lens element;
a metal oxide coating that covers a side portion of the wet lens element; and
a polyurethane liquid shield coating that covers the metal oxide coating.
1 Assignment
0 Petitions
Accused Products
Abstract
A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
36 Citations
20 Claims
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1. A projection optics system within an immersion lithography system comprising:
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a series of optical elements; a wet lens element; a metal oxide coating that covers a side portion of the wet lens element; and a polyurethane liquid shield coating that covers the metal oxide coating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A projection optics system, comprising:
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a series of optical elements; a wet lens element; a metal oxide layer on a side portion of the wet lens element; and a polyurethane layer on the metal oxide coating. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification