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Side Seal for Wet Lens Elements

  • US 20100271605A1
  • Filed: 07/13/2010
  • Published: 10/28/2010
  • Est. Priority Date: 09/25/2002
  • Status: Active Grant
First Claim
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1. A projection optics system within an immersion lithography system comprising:

  • a series of optical elements;

    a wet lens element;

    a metal oxide coating that covers a side portion of the wet lens element; and

    a polyurethane liquid shield coating that covers the metal oxide coating.

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  • 1 Assignment
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