MULTI-BAND SUB-WAVELENGTH IR DETECTOR HAVING FREQUENCY SELECTIVE SLOTS AND METHOD OF MAKING THE SAME
First Claim
1. A multiband infrared (IR) detector array, comprising:
- a metallic surface having a plurality of periodic resonant structures, each periodic structure configured to resonantly transmit electromagnetic energy in a distinct frequency band; and
a plurality of pixels each comprising at least first and second resonant structures corresponding to first and second wavelengths, respectively,wherein, for each pixel, the first and second resonant structures each have respective first and second detectors associated therewith,wherein the first and second resonant structures are arranged such that essentially all of the electromagnetic energy at the first wavelength passes through the first resonant structure onto the first detector and essentially all of the electromagnetic energy at the second wavelength passes through the second resonant structure onto the second detector, wherein the first and second detectors comprise mercad telluride.
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Abstract
In one embodiment, a multiband infrared (IR) detector array includes a metallic surface having a plurality of periodic resonant structures configured to resonantly transmit electromagnetic energy in distinct frequency bands. A plurality of pixels on the array each include at least first and second resonant structures corresponding to first and second wavelengths. For each pixel, the first and second resonant structures have an associated detector and are arranged such that essentially all of the electromagnetic energy at the first wavelength passes through the first resonant structure onto the first detector, and essentially all of the electromagnetic energy at the second wavelength passes through the second resonant structure onto the second detector. In one embodiment, the resonant structures are apertures or slots, and the IR detectors may be mercad telluride configured to absorb radiation in the 8-12 μm band. Detection of more than two wavelengths may be achieved by proper scaling. A method of forming an IR detector array is also disclosed.
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Citations
16 Claims
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1. A multiband infrared (IR) detector array, comprising:
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a metallic surface having a plurality of periodic resonant structures, each periodic structure configured to resonantly transmit electromagnetic energy in a distinct frequency band; and a plurality of pixels each comprising at least first and second resonant structures corresponding to first and second wavelengths, respectively, wherein, for each pixel, the first and second resonant structures each have respective first and second detectors associated therewith, wherein the first and second resonant structures are arranged such that essentially all of the electromagnetic energy at the first wavelength passes through the first resonant structure onto the first detector and essentially all of the electromagnetic energy at the second wavelength passes through the second resonant structure onto the second detector, wherein the first and second detectors comprise mercad telluride. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of forming a multiband infrared (IR) detector array, the method comprising:
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forming an IR absorber material on a substrate; forming a plurality of mesas in the absorber material; depositing an oxide layer on the substrate; and forming a metallic surface on the oxide layer so as to define a pixel comprising a plurality of apertures each having a length associated therewith, wherein each aperture is associated with one of the plurality of mesas, wherein the length of each aperture in the pixel is selected to be resonant to one of a plurality of different IR wavelengths. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification